Journal ArticleDOI
Intermodulation distortion and power handling in RF MEMS switches, varactors, and tunable filters
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TLDR
In this article, the authors present a theoretical and experimental study of the nonlinear effects generated RF-microelectromechanical system (MEMS) varactors and capacitive switches.Abstract:
This paper presents a theoretical and experimental study of the nonlinear effects generated RF-microelectromechanical system (MEMS) varactors and capacitive switches. The theoretical part includes an analytic derivation, as well as an electromechanical model suitable for computer-aided design (CAD) simulation. The simulations agree very well with measurements performed on a 24-GHz three-pole MEMS tunable filter. It is shown that MEMS capacitive components with a spring constant k>10 N/m generate very low intermodulation, as compared to semiconductor devices, and lead to a two-tone third-order intermodulation intercept point (IIP3) greater than +40 dBm for /spl Delta/f>3-5f/sub 0/, where f/sub 0/ is the mechanical resonant frequency. In fact, the IIP3 increases to +80 dBm for a difference signal (/spl Delta/f) of 5 MHz. The CAD model also allows the evaluation of the power-handling capabilities of the tunable filter and, it is seen that, for the case presented here, distortions become significant for an input power greater than +20 dBm. Noise generation due to thermal effects on a movable membrane (Brownian noise) is also modeled and it is shown that the tunable filter results in a very low phase-noise level close to the carrier.read more
Citations
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Journal ArticleDOI
Reconfigurable Antennas for Wireless and Space Applications
TL;DR: Several examples of reconfigurable antennas for both terrestrial and space applications are highlighted, such as cognitive radio, multiple-input-multiple-output (MIMO) systems, and satellite communication.
Journal ArticleDOI
Tuning in to RF MEMS
Gabriel M. Rebeiz,Kamran Entesari,I. Reines,Sang-June Park,Mohamed El-Tanani,A. Grichener,April S. Brown +6 more
TL;DR: RF MEMS technology was initially developed as a replacement for GaAs HEMT switches and p-i-n diodes for low-loss switching networks and X-band to mm-wave phase shifters, but it has been found that its very low loss properties, its simple microwave circuit model and zero power consumption, and its high power handling capabilities make it the ideal tuning device for reconfigurable filters, antennas and impedance matching networks.
Journal ArticleDOI
Miniature and tunable filters using MEMS capacitors
TL;DR: In this paper, a miniature three-pole filter with 8.6% bandwidth based on high-Q MEMS bridge capacitors was developed for tunable bandpass filters at 18-22 GHz.
Journal ArticleDOI
A differential 4-bit 6.5-10-GHz RF MEMS tunable filter
TL;DR: In this article, the authors presented a state-of-the-art RF microelectromechanical systems wideband miniature tunable filter designed for 6.5-10 GHz frequency range.
Journal ArticleDOI
A 12-18-GHz three-pole RF MEMS tunable filter
TL;DR: In this paper, a coplanar-waveguide filter was proposed for the 12-18 GHz frequency range, with a tuning range of 40% with very fine resolution, and return loss better than 10 dB for the whole tuning range.
References
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Book
Vibration problems in engineering
TL;DR: In this article, the Probleme dynamique and Vibration were used for propagation of ondes reference records created on 2004-09-07, modified on 2016-08-08.
Journal ArticleDOI
RF MEMS switches and switch circuits
TL;DR: In this paper, the authors concentrate on electrostatic switches at 0.1-100 GHz with high reliability (100 million to 10 billion cycles) and wafer-scale manufacturing techniques.
Journal ArticleDOI
High-isolation CPW MEMS shunt switches. 1. Modeling
TL;DR: In this article, an electromagnetic model for membrane microelectromechanical systems (MEMS) shunt switches for microwave/millimeter-wave applications is presented, where the up-state capacitance can be accurately modeled using three-dimensional static solvers and full-wave solvers are used to predict the current distribution and inductance of the switch.
Journal ArticleDOI
High-isolation CPW MEMS shunt switches. 2. Design
TL;DR: In this article, the LC series resonance of the shunt switch was used to tune two and four-bridge "cross" switches from 10 to 40 GHz with an insertion loss of less than 0.3-0.6 dB, a return loss below -20 dB from 22 to 38 GHz in the up state, and a downstate isolation of 45-50 dB with only 1.5 pF of downstate capacitance.
Journal ArticleDOI
RF MEMS phase shifters: design and applications
TL;DR: In this paper, the reliability of MEMS phase shifters is worse than of single switches since they employ 8-16 MEMS switches and do not tolerate a failure in any of the switches.