Large-Aperture kHz Operating Frequency Ti-alloy Based Optical Micro Scanning Mirror for LiDAR Application
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TLDR
In this article, the authors presented a Ti-alloy-based electromagnetic micro scanning mirror with very large-aperture (12 mm) and rapid scanning frequency (1.24 kHz).Abstract:
A micro scanning mirror is an optical device used to scan laser beams which can be used for Light Detection and Ranging (LiDAR) in applications like unmanned driving or Unmanned Aerial Vehicle (UAV). The MEMS scanning mirror’s light-weight and low-power make it a useful device in LiDAR applications. However, the MEMS scanning mirror’s small aperture limits its application because it is too small to deflect faint receiving light. In this paper, we present a Ti-alloy-based electromagnetic micro scanning mirror with very large-aperture (12 mm) and rapid scanning frequency (1.24 kHz). The size of micro-scanner’s mirror plate reached 12 mm, which is much larger than familiar MEMS scanning mirror. The scanner is designed using MEMS design method and fabricated by electro-sparking manufacture method. As the experimental results show, the resonant frequency of the micro scanning mirror is 1240 Hz and the optical scanning angle can reach 26 degrees at resonance frequency when the actuation current is 250 mApp.read more
Citations
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Journal ArticleDOI
MEMS Mirrors for LiDAR: A review.
TL;DR: An extensive overview of Microelectronechanical Systems (MEMS) scanning mirrors specifically for applications in LiDAR systems is presented, and a figure of merit (FoM) is defined for MEMS mirrors inLiDAR scanners in terms of aperture size, field of view (foV) and resonant frequency.
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AlN film based piezoelectric large-aperture MEMS scanning micromirror integrated with angle sensors
TL;DR: In this article, the authors reported the successful implementation of an aluminum nitride (AlN) piezoelectric film for the fabrication of a large-aperture MEMS scanning micromirror.
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A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors
TL;DR: LiDAR sensor principles are introduced in this paper , including three commonly used sensing schemes: pulsed time of flight (TOF), amplitude-modulated continuous wave (AMW), and frequency-modified continuous wave.
Proceedings ArticleDOI
Laser Eyes for Driverless Cars: The Road to Automotive LIDAR
Cibby Pulikkaseril,Stanley Lam +1 more
TL;DR: The requirements for automotive LIDAR are analyzed and a novel taxonomy of classifying different beamsteering methods is suggested, which suggests a novel approach to classification of beamsteered methods for fully autonomous vehicles.
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FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor
TL;DR: The results of the long-term mechanical cycling test suggest that the maximum variations of resonant frequency and scan angle are less than 0.3% and 6%, respectively, which means this simple and robust micromirror has great potential in being useful in a number of optical micro systems, especially when large-aperture or low-frequency is required.
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