Journal ArticleDOI
Mirage-effect-based depth profiling of micromachined silicon structures
TLDR
In this paper, a noncontact, non-destructive technique for the depth profiling of micromachined structures is presented based on the mirage or optical-beam deflection method of photothermal spectroscopy, an experimental measurement of a 8 μm step in silicon is given by way of illustration.Abstract:
A non-contact, non-destructive technique for the depth profiling of micromachined structures is presented. Based on the mirage or optical-beam deflection method of photothermal spectroscopy, an experimental measurement of a 8 μm step in silicon is given by way of illustration.read more
Citations
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Journal ArticleDOI
Interface study of bonded wafers by digitized linear frequency modulated thermal wave imaging
TL;DR: In this article, the authors proposed a digitized linear frequency modulated thermal wave imaging (DFMTWI) method for the interface study of the bonded wafers that are frequently used in MEMS and VLSI.
Proceedings ArticleDOI
A novel suspension arm with 2-dimensional actuation, for flying height control and high-bandwidth track following in advanced hard disk drives
TL;DR: In this paper, a 2D suspension arm with 2D actuation was developed to provide high-bandwidth data tracking when fully integrated in a hard disk drive environment, which is known as dual-stage actuation, with the added feature of adjusting the flylng height of the head with great precision and accuracy.
Proceedings ArticleDOI
Multi-layer bulk PZT actuators for flying height control in ruggedised hard disk drives
TL;DR: In this paper, a suspension arm is developed which incorporates multi-layer bulk PZT actuators to enable real-time active adjustment of the head flying height with high precision and accuracy while the disk drive is in operation.
Patent
Photothermal measuring system
Werner Faubel,Stefan Heissler +1 more
TL;DR: A photothermal recording system has a scanning mirror (21) between excitation laser (11) and object (10) reflecting excitation and measurement beams onto an optical filter (23) reflecting the measurement wavelength only through a focussing lens (27) and mirror (26) so as to view (30) the air above the object.
Proceedings ArticleDOI
Temperature measurements by laser beam deflection
TL;DR: In this article, a tungsten lamp that illuminates a solid material enclosed in a glass container filled with distilled water was used to generate heating of the sample, and a four quadrants position sensor monitored the movement of the spot of the laser using a lock-in amplifier.
References
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Book
Conduction of Heat in Solids
H. S. Carslaw,John Conrad Jaeger +1 more
TL;DR: In this paper, a classic account describes the known exact solutions of problems of heat flow, with detailed discussion of all the most important boundary value problems, including boundary value maximization.
Journal ArticleDOI
Photothermal deflection spectroscopy and detection
TL;DR: The theory for a sensitive spectroscopy based on the photothermal deflection of a laser beam is developed and its implications for imaging and microscopy are given, and the sources of noise are analyzed.
Journal ArticleDOI
Thermo‐optical spectroscopy: Detection by the ’’mirage effect’’
TL;DR: In this paper, a new thermo-optical method based on the sensitive detection of thermal gradients adjacent to heated sample surfaces is described, and room and low-temperature experiments are performed using this technique, and its advantages over different methods are discussed.
Journal ArticleDOI
Photothermal spectroscopy using optical beam probing: Mirage effect
J. C. Murphy,L. C. Aamodt +1 more
TL;DR: In this article, a theory of optical beam deflection near a heated surface was introduced as a method of photothermal spectroscopy and applied to the measurement of thermal diffusivity of gases.
Journal ArticleDOI
Compact design for photothermal deflection (mirage): spectroscopy and imaging
F. Charbonnier,D. Fournier +1 more
TL;DR: In this paper, the authors describe a new design for a mirage cell which is much more compact than the previously described setup and whose sensitivity has been improved by an order of magnitude.