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Journal ArticleDOI

Preparation and structure of carbon film deposited by a mass‐separated C+ ion beam

Takeo Miyazawa, +3 more
- 01 Jan 1984 - 
- Vol. 55, Iss: 1, pp 188-193
TLDR
In this article, it was shown that the carbon film is amorphous and does not contain graphitically bonded carbon atoms, and the atomic density of the film calculated from the energy loss due to the plasma oscillation of valence electrons is 1.7×1023 atoms/cm3, which is in good agreement with that of diamond.
Abstract
Carbon films were deposited using mass‐separated C+ ions of 300 and 600 eV. The films have diamond‐like characteristics such as transparency in the visible spectral region with wavelengths longer than about 650 nm and in the infrared, and high electrical resistivity. Transmission electron diffraction analysis shows that the film is amorphous and does not contain graphitically bonded carbon atoms. Kα x‐ray emission spectrum of the carbon in the film agrees well with that of diamond. In the x‐ray photoemission spectrum of the film, no characteristic energy loss due to π plasmon was observed. The atomic density of the film calculated from the energy loss due to the plasma oscillation of valence electrons is 1.7×1023 atoms/cm3, which is in good agreement with that of diamond. These results indicate that the film deposited using C+ ion beam consists of tetrahedraly bonded carbon atoms.

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Citations
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Journal ArticleDOI

Diamond-like amorphous carbon

TL;DR: In this paper, the authors describe the deposition methods, deposition mechanisms, characterisation methods, electronic structure, gap states, defects, doping, luminescence, field emission, mechanical properties and some applications of diamond-like carbon.
Journal ArticleDOI

Low-Pressure, Metastable Growth of Diamond and "Diamondlike" Phases

TL;DR: Vapor-grown diamond and diamondlike materials may have eventual applications in abrasives, tool coatings, bearing surfaces, electronics, optics, tribological surfaces, and corrosion protection.
Journal ArticleDOI

Properties of diamond-like carbon

TL;DR: In this paper, the preparation and properties of amorphous carbon and hydrogenated amorphized carbon, often known as diamond-like carbon, have been discussed and models of the electronic structure and mechanical properties are used to relate the physical properties to the atomic structure.
Journal ArticleDOI

Hard amorphous (diamond-like) carbons

TL;DR: In this paper, a chemical bonding model is developed which describes the arrangement of these sites and which accounts for many of the electronic and mechanical properties of amorphous carbon, including elastic modulus, hardness, wear rate, friction and film adhesion.
Journal ArticleDOI

Deposition mechanisms for promoting sp3 bonding in diamond-like carbon

TL;DR: In this paper, it is proposed that the sp3 bonding arises from an increased density, owing to carbon ions entering subsurface atomic sites, and an optimum ion energy arises from a balance between the incident carbon ions having sufficient energy to penetrate the surface atomic layer, while minimizing any excess energy dissipated in a thermal spike.
References
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Journal ArticleDOI

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

TL;DR: In this article, an integrodifferential equation for the sputtering yield is developed from the general Boltzmann transport equation, and solutions of the integral equation are given that are asymptotically exact in the limit of high ion energy as compared to atomic binding energies.
Journal ArticleDOI

Ion‐Beam Deposition of Thin Films of Diamondlike Carbon

TL;DR: Ion beam deposition of insulating carbon thin films on room temperature substrates, considering transparency, index of refraction, insulating capacity, glass scratching ability, etc. as discussed by the authors.
Journal ArticleDOI

X-ray photoemission studies of diamond, graphite, and glassy carbon valence bands

TL;DR: In this article, high-resolution x-ray photoemission spectra of the total valence bands of atomically clean diamond, graphite, and glassy carbon, obtained with monochromatized Al K..cap alpha.. radiation, are reported and discussed.
Journal ArticleDOI

Ion-beam-deposited polycrystalline diamondlike films

TL;DR: In this article, X-ray and electron beam diffraction analyses have been carried out on thin films deposited from a beam of carbon ions, and results show that the films consist of a polycrystalline background of cubic diamond with a particle size of 50-100 A with single-crystal regions up to 5 μm in diameter.
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