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Process and apparatus for forming nanoparticles using radiofrequency plasmas

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TLDR
In this paper, a method for the synthesis of single-crystal semiconductor nanoparticles, including photoluminescent silicon nanoparticles with diameters of no more than 10 nm, is described.
Abstract
Methods and apparatus for producing nanoparticles, including single-crystal semiconductor nanoparticles, are provided. The methods include the step of generating a constricted radiofrequency plasma in the presence of a precursor gas containing precursor molecules to form nanoparticles. Single-crystal semiconductor nanoparticles, including photoluminescent silicon nanoparticles, having diameters of no more than 10 nm may be fabricated in accordance with the methods.

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TL;DR: An improved exhaust system for a gas-phase reactor and a reactor and system including the exhaust system including a channel fluidly coupled to an exhaust plenum is described in this article. But it does not specify the design of the exhaust manifold.
References
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Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices

TL;DR: In this article, the authors present methods and methods for assembling nanostructures into functional elements such as junctions, arrays and devices, as well as systems for practicing the methods.
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Plasma treatment method and apparatus

TL;DR: In this article, a treatment apparatus for treating a substrate under decompressed atmosphere is described, consisting of a chamber, an exhausting means for exhausting the chamber, a first electrode provided in the chamber on which the substrate is mounted or held, a second electrode provided on the chamber opposing the first electrode, a liquid supply source containing a liquid material from which a process gas is generated, a housing provided between the liquid source and the chamber to be communicated to the liquid supplier and the room, a porous heating unit arranged in the housing for generating the process gas by heating the liquid material supplied
PatentDOI

Direct current high-pressure glow discharges

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TL;DR: In this paper, a waveguide core and a nanocomposite material optically coupled to the waveguide was described. But the authors did not specify the number of quantum dots.
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Plasma processing apparatus

TL;DR: In this article, a plasma processing apparatus is configured to alternately introduce an etch gas and a deposition gas into the chamber through the at least on gas inlet, and to strike a plasma into the etch gases and the deposition gas alternately introduced in the chamber.