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Journal ArticleDOI

Process fault detection based on modeling and estimation methods-A survey

Rolf Isermann
- 01 Jul 1984 - 
- Vol. 20, Iss: 4, pp 387-404
TLDR
This contribution presents a brief summary of some basic fault detection methods, followed by a description of suitable parameter estimation methods for continuous-time models.
About
This article is published in Automatica.The article was published on 1984-07-01. It has received 2367 citations till now. The article focuses on the topics: Fault detection and isolation & Process modeling.

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Citations
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Journal ArticleDOI

Neural network-based real-time malfunction diagnosis of reactive ion etching using in situ metrology data

TL;DR: It is concluded that the OES and RGA sensors, in conjunction with the TSNN models, can be effectively used for RIE monitoring and diagnosis and D-S theory is shown to be an appropriate inference methodology.
Proceedings ArticleDOI

Integrated fault detection and diagnosis

TL;DR: A unified frame for integration of different fault detection and decision techniques via approximate reasoning on analytical and heuristic fuzzy symptoms is proposed.
Patent

General method for tracking the evolution of hidden damage or other unwanted changes in machinery components and predicting remaining useful life

TL;DR: In this paper, a method and apparatus for determining a slowly evolving damage state in a system having a time scale separation between a fast subsystem and a slow subsystem is presented, the method includes acquiring measurement data of the fast subsystem of said system, determining a tracking function for the system, and evaluating the tracking function using the acquired measurement data to determine a measure of the slow damage subsystem the system.
Journal ArticleDOI

Quantitative fault estimation for a class of non-linear systems

TL;DR: A methodology for actuator fault diagnostics and quantitative estimation of fault signals in a class of nonlinear systems that includes Lipschitz, positive real and sector nonlinear functions and can also be specialized to linear time invariant systems is developed.
Book

Robust Control for Uncertain Networked Control Systems with Random Delays

TL;DR: The main technique used in this book is based on the Lyapunov-Razumikhin method, which results in delay-dependent controllers, and the existence of such controllers and fault estimators are given in terms of the solvability of bilinear matrix inequalities.
References
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Journal ArticleDOI

Paper: A survey of design methods for failure detection in dynamic systems

TL;DR: This paper surveys a number of methods for the detection of abrupt changes in stochastic dynamical systems, focusing on the class of linear systems, but the basic concepts carry over to other classes of systems.
Book

Digital Control Systems

TL;DR: This chapter introduces the z-Transform, a new type of transform that combines Laplace Transforms, z-Transforms and Modified Z-TRANSFORMS with Convolution Integral to achieve state-of-the-art control of Discrete-Data Systems.
Journal ArticleDOI

Correspondence item: An innovations approach to fault detection and diagnosis in dynamic systems

R. K. Mehra, +1 more
- 01 Sep 1971 - 
TL;DR: A general approach to fault detection, diagnosis and prognosis in systems describable by mathematical models is outlined, based on System Theory and Statistical Decision Theory.
Dissertation

Failure accomodation in linear systems through self-reorganization.

TL;DR: In this article, the authors present a model for the first unmanned aerial vehicle (UAV) and demonstrate its performance in the first flight test of the UAV-A1.
Journal ArticleDOI

Parameter estimation for continuous-time models-A survey

TL;DR: The paper reviews the progress of research on parameter estimation for continuous-time models of dynamic systems over the period 1958-1980 and includes a classification system which conforms as closely as possible to that which has arisen naturally over the past two decades.