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Journal ArticleDOI

Processing and electrical properties of Pb (ZrxTi1−x)O3 (x=0.2–0.75) films: Comparison of metallo‐organic decomposition and sol‐gel processes

M. Klee, +4 more
- 15 Aug 1992 - 
- Vol. 72, Iss: 4, pp 1566-1576
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TLDR
In this article, a spincoating technique was used to obtain thin Pb(ZrxTi1−x)O3 films with zirconium concentrations ranging from x=0.2 to 0.75.
Abstract
The deposition of thin Pb(ZrxTi1−x)O3 films by sol‐gel and by metallo‐organic decomposition (MOD) processes has been studied. Powders obtained from different precursor solutions were analyzed with respect to their decomposition and crystallization. Using a spin‐coating technique, Pb(ZrxTi1−x)O3 films with zirconium concentrations ranging from x=0.2 to 0.75 have been deposited on Pt‐electroded Si wafers. The lattice constants of the perovskite films and their dielectric and ferroelectric properties (permittivity, remanent polarization, coercive field strength) have been measured as a function of the zirconium concentration. The results are compared to the data obtained on bulk ceramics. For Pb(ZrxTi1−x)O3 films with a composition located at the morphotropic phase boundary (x≊0.53) the influence of the processing and the lead excess of the starting solutions on the film properties was examined. First measurements on the resistance degradation of thin Pb(Zr0.53Ti47)O3 films deposited by the MOD process are r...

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Citations
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Journal ArticleDOI

Measurement of piezoelectric coefficients of ferroelectric thin films

TL;DR: In this article, the normal load method is used to measure the coefficients for PZT thin films with various compositions prepared by the solgel technique or by organometallic chemical vapor deposition (OMCVD).
Journal ArticleDOI

Chemical Solution Deposition of Perovskite Thin Films

TL;DR: The use of chemical solution deposition for the fabrication of perovskite thin films is reviewed in this paper, where a variety of approaches including sol−gel, chelate, and metalloorganic decomposition have all been employed with success in the preparation of these materials.
Journal ArticleDOI

Chemical solution deposition of electronic oxide films

TL;DR: Schwartz et al. as mentioned in this paper reviewed various chemical aspects of different approaches, including sol-gel, hybrid, and metallo-organic decomposition (MOD) routes, which all have been successfully applied for the deposition of this class of materials.
Journal ArticleDOI

Processing, Structure, Properties, and Applications of PZT Thin Films

TL;DR: Ferroelectrics are dielectric materials that have spontaneous polarization in certain temperature range and show nonlinear polarization-electric field dependence called a hysteresis loop as discussed by the authors.
Journal ArticleDOI

Ferroelectric properties and fatigue of PbZr0.51Ti0.49O3 thin films of varying thickness: Blocking layer model

TL;DR: In this paper, it was shown that the coercive field is independent of thickness having a value of 2.4 V/μm and the ratio ebl/dbl is in the range 20−28 nm−1; the voltage across the blocking layer is proportional to the polarization, Vbl=cP, where c=4.1±0.5 Vm2/C; and (iv) the polarization depends on the electric field in the PZT layer.
References
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Journal ArticleDOI

dc Electrical Degradation of Perovskite-Type Titanates: I, Ceramics

TL;DR: In this article, the rate of the resistance degradation of doped SrTiO3 ceramics is investigated as a function of various external and material parameters, including voltage, electric field, and thickness of the dielectric.
Journal ArticleDOI

Internal bias in ferroelectric ceramics: Origin and time dependence

TL;DR: In this paper, the internal bias field which is observed in many ferroelectric materials is explained semiquantita-tively by Dipolar defects in the Ferroelectric cause div P # O at the defect sites.
Journal ArticleDOI

Preparation of epitaxial Pb(ZrxTi1−x)O3 thin films and their crystallographic, pyroelectric, and ferroelectric properties

TL;DR: In this article, lead zirconate-titanate (PZT) thin films with tetragonal and rhombohedral structures have been successfully grown with good epitaxy on MgO single crystals and on [100]-oriented platinum thin films by rf•magnetron sputtering.
Journal ArticleDOI

Piezoelectric Properties of Polycrystalline Lead Titanate Zirconate Compositions

TL;DR: In this article, detailed data for the piezoelectric, elastic, and dielectric properties of lead titanate zirconate ceramic compositions near the rhombohedral-tetragonal phase boundary are given.
Journal ArticleDOI

Sol-gel-derived PbTiO 3

TL;DR: The sol-gel process is a technique which is applicable for forming ceramic materials as discussed by the authors, where liquid precursor materials are reacted to form a sol which then polymerizes into an inorganic polymeric gel.
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