Journal ArticleDOI
Properties and coating rates of diamond-like carbon films produced by R.F. glow discharge of hydrocarbon gases
TLDR
In this article, the properties of films produced by cracking various hydrocarbon gases in an r.f. glow discharge were studied and it was shown that the production rates for the films increased with the molecular weight for gases having the same structural form, e.g. C4H10 had a higher coating rate than CH4 under the same plasma conditions.About:
This article is published in Thin Solid Films.The article was published on 1979-10-15. It has received 67 citations till now. The article focuses on the topics: Glow discharge & Coating.read more
Citations
More filters
Journal ArticleDOI
rf‐plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications
TL;DR: In this article, the authors describe the deposition of amorphous hydrogenated hard carbon (a-C:H) thin films from benzene vapor in a rf plasma.
Journal ArticleDOI
History of diamond-like carbon films — From first experiments to worldwide applications
K. Bewilogua,Dieter Hofmann +1 more
TL;DR: A diamond-like carbon (DLC) films combine several excellent properties like high hardness, low friction coefficients and chemical inertness as mentioned in this paper, and the importance for industrial applications became more and more evident.
Journal ArticleDOI
Optical constants of a hydrogenated amorphous carbon film
TL;DR: The real and imaginary parts of the complex index of refraction of a hydrogenated amorphous carbon (a•C:H) film have been determined for photon energies between 145 and 49 eV from measurements of reflectance R and transmittance T.
Journal ArticleDOI
Preparation and properties of hard i-C and i-BN coatings
Chr. Weissmantel,K. Bewilogua,K. Breuer,D. Dietrich,U. Ebersbach,H.-J. Erler,B. Rau,G. Reisse +7 more
TL;DR: In this paper, the state of the art in preparing and investigating hard i-C films is discussed in the context of new experimental results, and the results of electron diffraction analysis and electron energy loss spectrometry in conjunction with the relatively low mass density of the films suggest a structural model consisting of puckered n-fold carbon rings.
Journal ArticleDOI
Structure and bonding studies of the C:N thin films produced by rf sputtering method
TL;DR: In this article, a graphite target in a mixed argon/nitrogen plasma was prepared by rf diode sputtering of graphite targets in order to produce thin C:N films.
References
More filters
Book
The identification of molecular spectra
R. W. B. Pearse,A. G. Gaydon +1 more
TL;DR: In this paper, the Spectra of Deuterides spectra are used to identify persistent band heads, and the identification of bands is discussed. But they do not specify the number of heads.
Journal ArticleDOI
Ion‐Beam Deposition of Thin Films of Diamondlike Carbon
Sol Aisenberg,Ronald W. Chabot +1 more
TL;DR: Ion beam deposition of insulating carbon thin films on room temperature substrates, considering transparency, index of refraction, insulating capacity, glass scratching ability, etc. as discussed by the authors.
Journal ArticleDOI
Ion-beam-deposited polycrystalline diamondlike films
TL;DR: In this article, X-ray and electron beam diffraction analyses have been carried out on thin films deposited from a beam of carbon ions, and results show that the films consist of a polycrystalline background of cubic diamond with a particle size of 50-100 A with single-crystal regions up to 5 μm in diameter.
Journal ArticleDOI
Deposition of hard and insulating carbonaceous films on an r.f. target in a butane plasma
L. Holland,S.M. Ojha +1 more
Journal ArticleDOI
The deposition of hard surface layers by hydrocarbon cracking in a glow discharge
D.S. Whitmell,R. Williamson +1 more
TL;DR: Hard surface layers with a Vickers hardness of greater than 2000 have been deposited on titanium alloys, Nimonic, high tensile steel and stainless steels by cracking ethylene in a glow discharge as mentioned in this paper.
Related Papers (5)
The growth of carbon films with random atomic structure from ion impact damage in a hydrocarbon plasma
L. Holland,S.M. Ojha +1 more