Proceedings ArticleDOI
Second-order reset elements for stage control design
Leroy Hazeleger,MF Marcel Heertjes,Henk Nijmeijer +2 more
- pp 2643-2648
TLDR
The validity and predictive value of the control design procedure (both in terms of stability and performance) will be demonstrated by means of (measurement) results obtained from an industrial wafer stage system.Abstract:
In dealing with inherent limitations during stage control design, the possibilities of a second-order reset element (SORE) are studied, in particular, a second-order low-pass filter with reset. Inducing significantly less phase lag, which follows from describing function analysis, SOREs allow for a significant increase of bandwidth in comparison to linear second-order elements. Being part of a reset control design procedure, loop-shaping of the linear feedback loop with a reset element will be based on a describing function description of this element. For the reset control system, closed-loop stability will be verified by solving linear matrix inequalities. The validity and predictive value of the control design procedure (both in terms of stability and performance) will be demonstrated by means of (measurement) results obtained from an industrial wafer stage system.read more
Citations
More filters
Journal ArticleDOI
“Constant in Gain Lead in Phase” Element– Application in Precision Motion Control
TL;DR: In this article, a constant in gain lead in phase (CgLp) element using nonlinear reset technique is proposed for high-tech precision positioning applications, which can be integrated with PID and tested on one of the DOFs of a planar precision positioning stage.
Proceedings ArticleDOI
No More Differentiator in PID: Development of Nonlinear Lead for Precision Mechatronics
TL;DR: In this article, the authors developed a novel lead element which provides higher precision and stability compared to the linear lead filter and can be used as a replacement for the same, which is presented and validated on a Lorentz-actuated nanometer precision stage.
Journal ArticleDOI
Development of Robust Fractional-Order Reset Control
TL;DR: A framework for the combination of robust fractional-order CRONE control with nonlinear reset is given, which can provide well-tuned open-loop responses that can overcome the fundamental linear control limitation of Bode’s gain-phase relationship.
Proceedings ArticleDOI
A Hybrid Integrator-Gain Based Low-Pass Filter for Nonlinear Motion Control
TL;DR: The hybrid control design provides more design freedom compared to the equivalent linear control design, which leads to a factor two improvement in low-frequency disturbance suppression of a state-of-the-art scanning stage of an industrial wafer scanner.
Journal ArticleDOI
Resetting Disturbance Observers with application in Compensation of bounded nonlinearities like Hysteresis in Piezo-Actuators
TL;DR: In this article, a nonlinear disturbance observer (RDOB) is proposed for dynamic compensation of bounded nonlinearities like hysteresis in piezoelectric actuators.
References
More filters
Journal ArticleDOI
A nonlinear integrator for servomechanisms
TL;DR: In this paper, a nonlinear integrator is described which is superior in this respect to a linear type in the forward part of a servomechanism loop, where the time delay involved.
Journal ArticleDOI
Fundamental properties of reset control systems
TL;DR: This paper considers more general reset structures than previously considered, allowing for higher-order controllers and partial-state resetting, and gives a testable necessary and sufficient condition for quadratic stability and links it to both uniform bounded-input bounded-state stability and steady-state performance.
Journal ArticleDOI
Position Control in Lithographic Equipment [Applications of Control]
TL;DR: In this article, the basic optical principles in the lithographic tool, with the resulting positioning accuracy requirements, are described, and the six degrees of freedom (DOF) stage control is described with the main focus on actuator force decoupling, allowing the use of classical SISO controllers.
Journal ArticleDOI
Non-linear design for cost of feedback reduction in systems with large parameter uncertainty †
Isaac Horowitz,Patrick Rosenbaum +1 more
TL;DR: In this paper, a non-linear first-order reset element (FORE) is used to reduce the feedback loop transmission bandwidth of linear, minimum-phase plants with large parameter uncertainty.