Journal ArticleDOI
Technique for monolithic fabrication of microlens arrays
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TLDR
A microlens fabrication process is described which can be used in applications requiring integration of optical elements (lenses) and microcircuits and uses commercially available 1C processing materials.Abstract:
A microlens fabrication process is described which can be used in applications requiring integration of optical elements (lenses) and microcircuits. The process is fully compatible with IC fabrication technology and uses commercially available IC processing materials. The obtained microlenses are of excellent quality and basically show diffraction-limited resolution with ~1-μm spot size. Extensions of the process to production of nonspherical lenses and use of alternative material packages are also discussed.read more
Citations
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Journal ArticleDOI
Adaptive liquid microlenses activated by stimuli-responsive hydrogels
TL;DR: This work demonstrates a tunable liquid lens system that allows for autonomous focusing and uses pinned liquid–liquid interfaces to obtain stable devices and realize response times of ten to a few tens of seconds.
Journal ArticleDOI
Two-photon direct laser writing of ultracompact multi-lens objectives
TL;DR: Femtosecond two-photon direct laser writing was used to create 100µm-scale high-performance multi-lens objectives in this paper, where the authors used a two-phase direct laser writer.
Journal ArticleDOI
Design, fabrication and testing of microlens arrays for sensors and microsystems
TL;DR: In this article, the authors report on their activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems, including neural networks and multiple pupil imaging systems for photolithography.
Journal ArticleDOI
The manufacture of microlenses by melting photoresist
TL;DR: In this paper, it was shown that it is possible to generate very small lenses by melting "islands" of photoresist on a glass substrate, and the authors have made lenses with diameters ranging from 5 mu m to 750 mu m in the form of spheres, cylinders and crossed cylinders.
Patent
Lenslet array systems and methods
TL;DR: A stacked array magnifier (SAM) as discussed by the authors consists of one or more non-refractive lenslet arrays and one or multiple refractive lenslets to form a plurality of lenslet channels.
References
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Journal ArticleDOI
Resistance to spreading of liquids by sharp edges
TL;DR: In this paper, the Gibbs inequality condition for the equilibrium of a drop bound by an edge has been confirmed experimentally using a circular sapphire disk with a 90° edge and, to a lesser degree, using aluminum disks with edges subtending a range of angles.
Journal ArticleDOI
Photolytic technique for producing microlenses in photosensitive glass
TL;DR: A process is described whereby 2-D arrays of small diameter spherical lenses are produced in a homogeneous photosensitive glass by a photothermal technique on the basis of the density change of the photonucleated microcrystalline phase developed relative to the unexposed glass.
Journal ArticleDOI
Array of Distributed-Index Planar Micro-Lenses Prepared from Ion Exchange Technique
TL;DR: In this paper, a new class of arrayed distributed-index planar micro-lenses on a planar glass substrate has been monolithically fabricated, each lens is with 1.2 mm in diameter and measured focal length is 9.4 mm.
Proceedings ArticleDOI
A high photosensitive IL-CCD image sensor with monolithic resin lens array
Y. Ishihara,K. Tanigaki +1 more
TL;DR: In this paper, a high photosensitivity interline transfer CCD image sensor with monolithic resin lens array was developed, which reached 0.18 µA/µW at 550 nm, which corresponds to 0.4 quantum efficiency.