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Thermal stability of alumina thin films containing γ-Al2O3 phase prepared by reactive magnetron sputtering

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TLDR
In this paper, the thermal stability of alumina thin films containing γ-Al2O3 phase and its conversion to a thermodynamically stable α-Al 2O 3 phase during a post-deposition equilibrium thermal annealing was reported.
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This article is published in Applied Surface Science.The article was published on 2010-11-15. It has received 108 citations till now. The article focuses on the topics: Nanocrystalline material & Annealing (metallurgy).

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Citations
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Pulsed laser deposited alumina thin films

TL;DR: In this paper, the authors investigated the properties of thin amorphous alumina films under vacuum and partial pressure of argon, and showed that the thickness of the thin alumina films with thickness lower than 40nm exhibits a non-negligible void content that induces a decrease of the effective refractive index.
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Structural, optical and mechanical properties of amorphous and crystalline alumina thin films

TL;DR: In this article, thin films of amorphous alumina of thickness 350nm were deposited on fused silica substrates by electron beam evaporation and changes in film crystallinity, short-range structure, optical and mechanical properties were studied.
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Dielectric properties of DC reactive magnetron sputtered Al2O3 thin films

TL;DR: In this article, an as-deposited and annealed Al2O3-Al thin film capacitors were fabricated on glass substrates to study the effect of temperature and frequency on the dielectric property of the films.
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Morphology-dependent phase transformation of γ-Al2O3

TL;DR: The phase transformations of platelet and rod-shaped γ-Al2O3 were investigated and compared to that of a commercial sample by XRD, BET surface area measurements, transmission electron microscopy (TEM), solid state 27Al-NMR, and ethanol temperature programmed desorption (TPD) after sequential annealing in air up to 1100°C as mentioned in this paper.
References
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Journal ArticleDOI

Material selection for hard coatings

TL;DR: In this paper, the potential of multicomponent boride, carbide, nitride, and oxide systems as coating materials is discussed in view of their potential as coating material.
Book

Alumina as a ceramic material

TL;DR: In this paper, the authors present a detailed discussion of the main factors affecting the transition of the Alumina phase and their effect on the performance of the process. But they do not consider the effect of other factors, such as temperature, dehydration, and deformation of the phase.
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A review of the present state of art in hard coatings grown from the vapor phase

TL;DR: A review of the hard coating literature is given and includes in addition to nitrides and carbides also oxides, borides, mixed compounds, metals and alloys, and "diamondlike" carbon coatings.
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Deposition, microstructure and properties of texture-controlled CVD α-Al2O3 coatings

TL;DR: In this paper, the influence of nucleation on the microstructure and properties of CVD Al2O3 was investigated and the experimental layers were characterised using X-ray diffraction, scanning electron microscopy, and transmission electron microscope.
Journal ArticleDOI

Effect of the substrate temperature on the structure and properties of Al2O3 layers reactively deposited by pulsed magnetron sputtering

TL;DR: In this article, the structure and morphology of the layers were made via XRD and SEM techniques, respectively, and the hardness was determined by nanoindentation, and residual stresses were derived from the bending of the coated substrates.
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