Journal ArticleDOI
Tracking electron-induced carbon contamination and cleaning of Ru surfaces by Auger electron spectroscopy
TLDR
In this paper, the growth of carbon and oxygen desorption was investigated on a Ru surface by Auger electron spectroscopy (AES) in the presence and absence of additional photoelectrons (PEs) from a focusing Ru mirror.Abstract:
Extreme ultraviolet (EUV) radiation induced growth of carbon and oxygen desorption were investigated on a Ru surface by Auger electron spectroscopy (AES) in the presence and absence of additional photoelectrons (PEs) from a focusing Ru mirror. A decrease in EUV reflectivity with carbon growth in the presence of additional PEs has been observed. Conversely, a carbonaceous Ru surface was cleaned in sequential AES, and discussed in terms of secondary electron assisted dissociation of residual hydrocarbons and water molecules, followed by a chemical reaction between adsorbed carbon and oxygen atoms.read more
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Low energy Ar+ ion irradiation induced surface modification in cadmium zinc telluride (CdZnTe)
TL;DR: In this paper, modifications in structural, stoichiometry, and optical properties of Cadmium zinc telluride (CdZnTe) crystals due to 1 keV Ar+ ion irradiation as a function of ion fluence, using ion flux of 1.7 × 1017 ions cm−2 s−1.
Journal ArticleDOI
Primary electron energy dependent flashover in surface polarity on Au films
TL;DR: In this article, the primary electron energy (Ep) dependent change in target current was studied on a grounded Au film in the range of 40 to 3500 eV and the current jumped suddenly from a negative to a positive value at ∼650 eV with increasing Ep, while it disappeared in reverse sweep and with increasing substrate temperature.
Journal ArticleDOI
Nanoscale Ruthenium-Containing Deposits from Ru(CO)4I2 via Simultaneous Focused Electron Beam-Induced Deposition and Etching in Ultrahigh Vacuum: Mask Repair in Extreme Ultraviolet Lithography and Beyond
References
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Book
Practical surface analysis: By auger and x-ray photoelectron spectroscopy
David Briggs,M. P. Seah +1 more
Journal ArticleDOI
A new examination of secondary electron yield data
TL;DR: In this article, a new and thorough examination of secondary electron (SE) yield as a function of primary energy (EPE) and atomic number Z for the 44 elements in the database is made.
Journal ArticleDOI
A Theory of Secondary Electron Emission from Metals
TL;DR: In this paper, a theory of secondary electron emission from metals is formulated on the basis of the Sommerfeld free-electron model, momentum transfer between electrons and lattice being included by introducing a finite mean free path for elastic scattering.
Book
Handbook of surface and interface analysis : methods for problem-solving
Jean Claude Rivière,Sverre Myhra +1 more
TL;DR: In this article, the authors used spectroscopic and spectrometric techniques for analysis of surfaces and interfaces, core-level binding energies, Auger kinetic energies and modified Auger parameters for some chemical elements in various compounds, documentary standards in surface analysis.
Journal ArticleDOI
Nanometer interface and materials control for multilayer EUV-optical applications
TL;DR: In this article, an overview of the progress in thin film and surface physics involved in multilayered systems with nanometer scale periodicity is given, with special attention given to the development of thin diffusion barrier layers between the materials in the multilayers to enhance the optical contrast and to reduce the interdiffusion.