D
D. J. Eaglesham
Researcher at Bell Labs
Publications - 45
Citations - 1560
D. J. Eaglesham is an academic researcher from Bell Labs. The author has contributed to research in topics: Epitaxy & Silicon. The author has an hindex of 15, co-authored 45 publications receiving 1526 citations.
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Journal ArticleDOI
Structural relaxation and defect annihilation in pure amorphous silicon
Sjoerd Roorda,W.C. Sinke,J. M. Poate,Dale C. Jacobson,S. Dierker,Brian S. Dennis,D. J. Eaglesham,Frans Spaepen,Paul H. Fuoss +8 more
TL;DR: It is shown that amorphous Si formed by either implantation or deposition contains a large population of point defects and point-defect clusters, and structural relaxation, also known as short-range ordering, can be understood as annihilation of a large fraction of these defects.
Journal ArticleDOI
Ion beams in silicon processing and characterization
Eric Chason,S. T. Picraux,J. M. Poate,J. O. Borland,Michael I. Current,T. Diaz de la Rubia,D. J. Eaglesham,O. W. Holland,Mark E. Law,Charles W. Magee,James W. Mayer,John Melngailis,Al F. Tasch +12 more
TL;DR: In this paper, the authors review the current status and future trends in ion implantation of Si at low and high energies with particular emphasis on areas where recent advances have been made and where further understanding is needed.
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Limiting thickness hepi for epitaxial growth and room-temperature Si growth on Si(100).
Journal ArticleDOI
Growth morphology and the equilibrium shape: The role of ‘‘surfactants’’ in Ge/Si island formation
TL;DR: Sb impurities favor large flat islands which would lead to earlier island coalescence and can aid planar growth, while In (though otherwise a good «surfactant») leaves the film faceted.
Journal ArticleDOI
Limited thickness epitaxy in GaAs molecular beam epitaxy near 200 °C
TL;DR: In this article, the low-temperature limit to GaAs molecular beam epitaxy (MBE) was studied at temperatures from 250°C to room temperature, and it was shown that hepi depends strongly on composition, increasing rapidly with Ga/As ratio at fixed temperature.