M
Mahmut Sami Kavrik
Researcher at University of California, San Diego
Publications - 12
Citations - 98
Mahmut Sami Kavrik is an academic researcher from University of California, San Diego. The author has contributed to research in topics: Oxide & Atomic layer deposition. The author has an hindex of 5, co-authored 10 publications receiving 62 citations.
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Journal ArticleDOI
Ultralow Defect Density at Sub-0.5 nm HfO2/SiGe Interfaces via Selective Oxygen Scavenging.
Mahmut Sami Kavrik,Emily Thomson,Evgueni Chagarov,Kechao Tang,Scott T. Ueda,Vincent D.-H. Hou,Toshihiro Aoki,Moon J. Kim,Bernd Fruhberger,Yuan Taur,Paul C. McIntyre,Andrew C. Kummel +11 more
TL;DR: Density functional theory simulations demonstrate that a sub-0.5 nm thick SiO x-rich surface layer can produce an electrically passivated HfO2/SiGe interface, and fabrication of high-performance SiGe CMOS devices with these structures exhibited significant capacitance enhancement along with a reduction in interface defect density.
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Engineering High- k/SiGe Interface with ALD Oxide for Selective GeO x Reduction.
Mahmut Sami Kavrik,Peter Ercius,Joanna Cheung,Kechao Tang,Qingxiao Wang,Bernd Fruhberger,Moon J. Kim,Yuan Taur,Paul C. McIntyre,Andrew C. Kummel +9 more
TL;DR: This result shows that in scaled CMOS, remote oxide ALD (oxide ALD on top of the gate oxide) can be used to suppress electronic defects at gate oxide semiconductor interfaces by oxygen scavenging.
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Ferromagnetic resonance in Y3Fe5O12 nanofibers
TL;DR: Continuous bead-free polycrystalline yttrium iron garnet (YIG) nanofibers 100 mu m long and 50-100 nm in diameter were sintered by solgel calcination assisted electrospinning as discussed by the authors.
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Low interface trap density in scaled bilayer gate oxides on 2D materials via nanofog low temperature atomic layer deposition
Iljo Kwak,Mahmut Sami Kavrik,Jun Hong Park,Jun Hong Park,Larry Grissom,Bernd Fruhberger,Keith Tatseun Wong,Sean Kang,Andrew C. Kummel +8 more
TL;DR: In this paper, a self-nucleating Al2O3/HfO2 bilayer gate stack was constructed on a high aspect ratio Si3N4/SiO2/Si pattern surface.
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Density-functional theory molecular dynamics simulations of a-HfO2/a-SiO2/SiGe and a-HfO2/a-SiO2/Ge with a-SiO2 and a-SiO suboxide interfacial layers
TL;DR: In this article, a comprehensive density-functional theory (DFT) molecular dynamics simulations were performed to investigate interfaces between a-HfO2 and SiGe or Ge semiconductors with fully-stoichiometric a-SiO2 or sub-oxide SiO interlayers.