P
Petko Vitanov
Researcher at Bulgarian Academy of Sciences
Publications - 89
Citations - 1228
Petko Vitanov is an academic researcher from Bulgarian Academy of Sciences. The author has contributed to research in topics: Thin film & Dielectric. The author has an hindex of 15, co-authored 86 publications receiving 1162 citations.
Papers
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Journal ArticleDOI
Very low surface recombination velocities on p-type silicon wafers passivated with a dielectric with fixed negative charge
G. Agostinelli,Annelies Delabie,Petko Vitanov,Z. Alexieva,Harold Dekkers,S. De Wolf,Guy Beaucarne +6 more
TL;DR: In this paper, surface recombination velocities as low as 10 cm/s have been obtained by treated atomic layer deposition (ALD) of Al 2 O 3 layers on p-type CZ silicon wafers.
Journal ArticleDOI
Chemical deposition of Al2O3 thin films on Si substrates
TL;DR: In this paper, a uniform Al2O3 films were deposited on silicon substrates by the sol-gel process from stable coating solutions and the technological procedure includes spin coating deposition and investigating the influence of the annealing temperature on the dielectric properties.
Journal ArticleDOI
Influence of stoichiometry of direct plasma-enhanced chemical vapor deposited SiNx films and silicon substrate surface roughness on surface passivation
TL;DR: In this paper, direct plasma-enhanced chemical vapor deposited silicon nitride (SiNx) films on low resistivity (1.5 Ω cm) p-type Czochralski silicon substrate surfaces with different textures, to elucidate the influence of microroughness of the substrate surface on the surface-passivating properties of thin SiNx films.
Journal ArticleDOI
High-efficiency solar cell using a thin porous silicon layer
TL;DR: The performance improvement of solar cells due to the formation of a porous silicon layer on deep-junction n+/p silicon structures has been investigated in this paper, where the photovoltaic properties of two identical sample groups with and without porous silicon layers are compared.
Patent
Method for backside surface passivation of solar cells and solar cells with such passivation
TL;DR: In this article, a method for dielectric passivating the surface of a solar cell by accumulation of negative fixed charges of a first type at the interface between semiconductor material and a passivating material is presented.