Showing papers in "Vacuum in 1993"

TL;DR: In this article, both dynamic and static I-V characteristic curves of amorphous thin films of Se 75 Ge 25− x As x (5 ⩽ × ¾ 20) for switching and memory behavior have been studied.

TL;DR: In this paper, measured conductances of stainless steel tubes for flow rates of 10 −8 to 10 −14 mol s −1 with several inert gases are compared with various experimental and theoretical models of gas flow in the molecular, viscous and transition flow regimes.

TL;DR: In this paper, a 3 m long vacuum chamber was used to reproduce the low 10 − 14 torr range of the Helmer gauge in a ZrV-Fe Non Evaporable Getter (NEG).

TL;DR: In this article, the authors describe the micro-machining of micron and sub-micron scale structures by focused ion beams (FIB) and the characteristics of FIB milling are considered.

TL;DR: In this paper, an all-metal constant pressure flowmeter with uncertainties of 0.3-1.5% is described. But the uncertainties at this limit are only at the limit of ±9% and the high range of 1 Pa m3 s−1 (±5%).

TL;DR: In this paper, the authors describe advances made in the study of polymer surfaces at Sheffield University between 1988 and 1993 and describe some selected data from the different projects in which they have been involved.

TL;DR: The mechanism of energy transport by particles from the target of a planar magnetron sputter source to the substrate is investigated in this article, where the substrate heating gives information about the total energy transported by particles, and subsequent model calculations allow us to distinguish different energy transport mechanisms like electronic bombardment, ionic bombardment, motion of sputter particles and high energetic neutral bombardment.

TL;DR: In this article, the ion beam modification of polymers resulting from ion implantation with reference to fundamental ion-solid interactions is reviewed, which leads us to examine whether or not implantation is a contradiction in terms.

TL;DR: In this article, the wavelet propagation is employed to describe the evolution of surface topography during ion bombardment-induced sputtering erosion of solids, and it is demonstrated that Huygen's wavelet or characteristics (ray) tracing methods are equally valid but that the former is preferable when multiple gradient discontinuities can develop on generally rough surfaces and the latter is preferable for more gently contoured surfaces.

TL;DR: In this article, the grain boundary potential, the density of trap states and the carrier concentration of the films can be obtained by measuring reflectances of the film deposited on non-absorbing substrates.

TL;DR: In this article, focused ion beams generated from liquid metal field emission ion sources enable high resolution microfabrication by sputter machining, deposition and ion implantation, which is commonly used for micromachining and microdeposition.

TL;DR: In this paper, the uncertainties of the calibration pressures established by calibration systems using three kinds of calibration methods: expansion by series, by continuous flow, and by molecular beam, were investigated.

TL;DR: In this article, the influence of plasma nitriding on the subsequent growth of TiN coatings has been investigated, and it was found that coating-to-substrate adhesion, structure, morphology and texture of the TiN are affected by plasma-nitriding of the substrates.

TL;DR: In this article, an ionization gauge with a cold electron source has been constructed and its performance has been evaluated, and the Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and low outgas condition has been obtained after the long operation of 1mA emission for approximately 1 month.

TL;DR: In this paper, the nitrogen depth profiles were measured by using the nuclear resonance reaction 15 N(p,αγ) 12 C at E res =429 keV ( Γ =120 eV ).

TL;DR: In this article, a small quadrupole mass analyser was used to measure the residual gases in a stainless steel ultra-high vacuum system of 7500 l volume, pumped by a NEG pump.

TL;DR: In this article, the authors used hot-filament chemical vapor deposition to grow diamond particles on both iron coated substrates and pretreated substrates in a methane atmosphere, using hot-film chemical vaporization.

TL;DR: In this article, a detailed investigation has been made on the influence of oxygen partial pressure and sputtering current on the linear optical properties of ZnO thin films, and it has been shown that by optimizing these two parameters, the zinc oxide coatings may have a refractive index n close to single crystal data.

TL;DR: In this article, structural and mechanical changes in layers of eutectic aluminum alloys after doping with Fe, Cr, Ni, and Co followed by electron beam treatment are investigated.

TL;DR: In this article, two aluminum-alloy chambers treated with newly developed mirror-polishing technique (organo-mechanochemical polishing) have been constructed and their vacuum properties have been tested.

TL;DR: In this article, a pressure pulse generated by pulsed-laser-beam irradiation of the stainless steel surface in the chamber was used to measure the sticking probability, s, mean sojourn time, τ, and amount, σ, of adsorption on the surface of the chamber.

TL;DR: In this paper, the gas release and pumping speeds of various commercially available gauges are measured quantitatively, including the characteristics of cold cathode/inverted magnetron gauges (IMGs).

TL;DR: In this paper, the effects of ion bombardment during ion beam-assisted deposition of thin films are investigated and the experimental results show that the thin films of Cu and Ti that are prepared by the ion beam assisted deposition method have a better adhesion than the films prepared by other two methods.

TL;DR: In this article, the authors showed that the interface temperature depends on the thermal properties of the coating/substrate pair of materials and that the heat state of the substrate is more complex than it was supposed previously.

TL;DR: In this paper, the switching phenomenon in amorphous Sb 2 Se 3 films was found to be a memory switch, and the calculated values of the temperature inside the active region at the moment of switching make explanation of the memory type switching in Sb2Se 3 films possible on the basis of the electrothermal breakdown process.

TL;DR: In this paper, a Spindt-type field emitter array (FEA) has been tested in an ultrahigh vacuum as the electron source for a commercial quadrupole mass filter.

TL;DR: In this paper, it was shown that the atomic hydrogen density can be determined down to the value of 1 × 1018 m−3 provided that the total pressure is less than 10−2 Pa.

TL;DR: In this article, the outgassing rates of aluminum chambers vented to nitrogen atmospheres with different humidity were measured, both desorption and diffusion phenomena were observed in the rate curves, the lower the humidity the clearer the diffusion effect.

TL;DR: In this paper, a high-dose implantation of Fe into (100) silicon and subsequent annealing was studied by RBS, X-ray diffraction, infra-red spectroscopy and resistivity measurements.

TL;DR: In this paper, the conditions necessary for producing surface layers from a Ti(OC3H7)4+H2+N2 mixture on steels using the PACVD method are described.