Journal ArticleDOI
A fully integrated surface micromachined magnetic microactuator with a multilevel meander magnetic core
Chong H. Ahn,Mark G. Allen +1 more
TLDR
In this paper, a fully integrated magnetic microactuator using surface micromachining techniques is presented, where low-resistance meander conductors located in a single plane are interwoven with multilevel meander magnetic cores.Abstract:
A fully integrated magnetic microactuator using surface micromachining techniques is presented. To achieve this device, low-resistance meander conductors located in a single plane were interwoven with multilevel meander magnetic cores. This 'wrapped' solenoid (with the core wrapped around the conductor) was fabricated in a fully integrated fashion. A magnetic microactuator was realized by incorporating a surface micromachined nickel-iron cantilever beam as part of the magnetic circuit of the core. The nickel-iron cantilever beam was 2.5 mu m thick, 25 mu m wide, and 780 mu m long, and the magnetic circuit contained seventeen turns of meander-type solenoid coils. Cantilever beam tip deflection of 6 mu m in the vertical direction was achieved when a DC voltage less than 1 V (and resulting drive current of 800 mA) was applied to the coils. This fully integrated multilevel topology offers advantages in a variety of micromagnetic applications, where actuators can be fabricated on the same substrate with an integrated circuit and actuated with low voltages. >read more
Citations
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Journal ArticleDOI
Magnetic microactuators based on polymer magnets
TL;DR: In this article, an integrated permanent magnet microactuator was fabricated using micromachined polymer magnets and the hard magnetic material utilized is a polymer composite, consisting of magnetically hard ceramic ferrite powder imbedded in a commercial epoxy resin to a volume loading of 80%.
Journal ArticleDOI
Micromachined planar inductors on silicon wafers for MEMS applications
Chong H. Ahn,Mark G. Allen +1 more
TL;DR: The micromachined on-chip inductors can be applied for magnetic microelectromechanical systems devices, such as micromotors, microactuators, microsensors, and integrated power converters, which envisages new micropower magnetics on a chip with integrated circuits.
Patent
Apparatus and method for the generation, separation, detection, and recognition of biopolymer fragments
TL;DR: In this article, an integrated instrument for the high-capacity electrophoretic analysis of biopolymer samples is presented, in which the migration lanes are formed between a bottom plate and a plurality of etched grooves in a top plate, permitting concurrent separation of 80 or more separate samples.
Journal ArticleDOI
A fully integrated micromachined magnetic particle separator
TL;DR: In this article, a prototype micromachined magnetic particle separator that can separate magnetic particles from suspended liquid solutions has been realized on a silicon wafer, which yields several advantages in design flexibility, compactness, electrical and optical monitoring, and integration feasibility.
Journal ArticleDOI
Modeling of two-hot-arm horizontal thermal actuator
TL;DR: In this article, a lumped model of a two-hot-arm horizontal thermal actuator is presented, and a finite element analysis (FEA) and experimental results are provided.
References
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