Journal ArticleDOI
A micromachined impact microactuator driven by electrostatic force
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TLDR
In this article, a micromachined actuator was developed to produce precise and unlimited displacement by impact force between a silicon micro-mass and a stopper, driven by electrostatic force.Abstract:
This paper presents a novel micromachined actuator which is developed to produce precise and unlimited displacement. The actuator is driven by impact force between a silicon micro-mass and a stopper. The suspended silicon micro-mass is encapsulated between two glass plates and driven by electrostatic force. When the mass hits the stopper which is fixed on glass plates, impact force is generated to drive the whole actuator in a nano size step (/spl sim/10 nm). The overall dimension of the device is 3 mm /spl times/3 mm. The driving voltage is 100 V and average speed is 2.7 /spl mu/m/s. The total thickness is 600 /spl mu/m.read more
Citations
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Journal ArticleDOI
MEMS actuators and sensors: observations on their performance and selection for purpose
TL;DR: In this paper, the performance of microelectromechanical systems (MEMS) actuators and sensors as a function of operating principle is compared with each other and with equivalent macroscopic devices.
Journal ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal ArticleDOI
Small, Fast, and Under Control: Wireless Resonant Magnetic Micro-agents
TL;DR: This work presents a novel type of microrobot called MagMite that utilizes a new class of wireless resonant magnetic micro-actuator that accomplishes all three tasks, and demonstrates how the robots exhibit a plethora of driving behaviors, how they can operate on a host of unstructured surfaces under both dry and wet conditions, andHow they can accomplish fully automated micromanipulation tasks.
Journal ArticleDOI
High-performance surface-micromachined inchworm actuator
M.P. de Boer,David L. Luck,W.R. Ashurst,Roya Maboudian,Alex David Corwin,Jeremy A. Walraven,James M. Redmond +6 more
TL;DR: In this article, a polycrystalline silicon surface-micromachined inchworm actuator is demonstrated, which exhibits high-performance characteristics such as large force (spl plusmn/0.5 millinewtons), large velocity range (0 to /spl+mn/4.4 mm/sec), large displacement range (/spl plusnm/100 microns), small step size (/spl +mn/10, /spl plusm/40 or /spl +m/m/sup 2/), low power consumption (nanojoules per cycle
High-performance surface-micromachined inchworm actuator.
Jeremy A. Walraven,James M. Redmond,David L. Luck,William R. Ashurst,Maarten P. de Boer,Roya Maboudian,Corwin Alex D +6 more
TL;DR: In this article, a polycrystalline silicon surface-micromachined inchworm actuator is presented, which exhibits high performance characteristics such as large force ({+-}0.5 millinewtons), large velocity range (0 to {+ − 4.4 mm/sec), large displacement range ({+ − 100 microns), small step size, low power consumption (nanojoules per cycle), continuous bidirectional operation and relatively small area (600 x 200{m{sup 2}).
References
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Proceedings ArticleDOI
Precise positioning mechanism utilizing rapid deformations of piezoelectric elements
TL;DR: In this article, a one-dimensional linear positioner using a micro mechanism consisting of one main object put on a guiding surface, a piezo, and a weight is connected to one end of the main object via the piezo.
Journal ArticleDOI
Linear microvibromotor for positioning optical components
TL;DR: In this article, an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology was presented for use in actuated micro-optical systems on silicon.
Journal ArticleDOI
Ultrahigh vacuum precise positioning device utilizing rapid deformations of piezoelectric elements
TL;DR: A bakable XYθ three-axis positioning table using a unique positioning mechanism utilizing friction and inertial forces caused by rapid deformations of piezoelectric elements was developed in this article.
Book ChapterDOI
Compact Squeezed-Film Damping Model for Perforated Surface
Timo Veijola,Tomi Mattila +1 more
TL;DR: In this article, a model for squeezed-film dampers with perforated surfaces is presented and the flow impedance due to perforation holes is augmented into the modified Reynolds equation.
Journal ArticleDOI
Polysilicon angular microvibromotors
Abraham P. Lee,Albert P. Pisano +1 more
TL;DR: In this paper, two types of LPCVD polysilicon angular microvibromotors were designed, fabricated, and successfully operated in air and in vacuum, both in low vacuum and in air.