Journal ArticleDOI
Analysis and experimental comparison of range-based control for dual-stage nanopositioners
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TLDR
A novel range-based control algorithm for dual-stage nanopositioners is studied and Experimental results show that the method effectively splits control effort between the actuators based on range and results in reduced tracking error.About:
This article is published in Mechatronics.The article was published on 2020-08-01. It has received 6 citations till now. The article focuses on the topics: Actuator.read more
Citations
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Journal ArticleDOI
Closed-Loop Range-Based Control of Dual-Stage Nanopositioning Systems
TL;DR: A closed-loop control framework for dual-stage nanopositioning systems is presented that allows the user to allocate control efforts to the individual actuators based on their range capabilities, and tracking results show that the root-mean-square tracking error for various triangular reference trajectories is improved.
Journal ArticleDOI
Observation of Stage Position in a 2-Axis Nano-positioner Using Hybrid Kalman Filter
TL;DR: A novel method for observation of the stage position in a 2D Nano-positioning system based on a hybrid Kalman filter that appropriately estimates the stage displacements, and its accuracy is improved when the filter time step reduces.
Journal ArticleDOI
A novel rapid micromotion compensator for high-precision chip bonding manufacturing
Lanyu Zhang,Jian Gao +1 more
TL;DR: In this paper, a micromotion compensator with a unique piezoelectric-spring structure is designed and implemented on the stage working end to reduce the positioning error in the Z-axis direction.
Journal ArticleDOI
A large-stroke rapid motion controller for servo applications with speed and control constraints
Wentao Yu,Guoyang Cheng +1 more
Journal ArticleDOI
Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning
TL;DR: In this paper , a rigid-flexible coupling motion stage (RFCMS) with compound flexure hinges (CFHs) and a single drive is designed to simultaneously achieve large stroke and nanoscale precision.
References
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Journal ArticleDOI
Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues.
TL;DR: This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning, as well as future challenges and research topics.
Journal ArticleDOI
Position Control in Lithographic Equipment [Applications of Control]
TL;DR: In this article, the basic optical principles in the lithographic tool, with the resulting positioning accuracy requirements, are described, and the six degrees of freedom (DOF) stage control is described with the main focus on actuator force decoupling, allowing the use of classical SISO controllers.
Journal ArticleDOI
Scanning Probe Microscopy
TL;DR: New perspectives on SPM-related science and technology, based on systems and control theory are described, which have led to a better understanding of SPM technology, overcome hurdles that limited the efficacy ofSPM, and resulted in new modes of S PM-based interrogation.
Journal ArticleDOI
On compensator design for linear time-invariant dual-input single-output systems
TL;DR: In this paper, a new method for the design of compensators for linear time-invariant dual-input/single-output (DISO) systems in continuous time or discrete time is presented.
Journal ArticleDOI
Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage
Tom Oomen,Robbert van Herpen,Sander Quist,Marc van de Wal,OH Okko Bosgra,M Maarten Steinbuch +5 more
TL;DR: The aim of this paper is to develop a combined system identification and robust control design procedure for high performance motion control and apply it to a wafer stage and confirm that the proposed procedure significantly extends existing results and enables next-generation motion control design.