Assessment of lithographic process variation effects in InGaAsP annular Bragg resonator lasers
TLDR
In this article, the effect of lithographic process variation upon device performance is studied and the resonance wavelength and threshold optical pump power are found to vary between similar devices given different electron doses during electron-beam lithography.Abstract:
Optical microresonators based on an annular geometry of radial Bragg reflectors have been designed and fabricated by electron-beam lithography, reactive ion etching, and an epitaxial transfer process. Unlike conventional ring resonators that are based on total internal reflection of light, the annular structure described here is designed to support optical modes with very small azimuthal propagation coefficient and correspondingly large free spectral range. The effect of lithographic process variation upon device performance is studied. Laser emission wavelength and threshold optical pump power are found to vary between similar devices given different electron doses during electron-beam lithography. As the resonance wavelength and quality factor of these resonators are very sensitive to environmental changes, these resonators make ideal active light sources that can be integrated into large arrays for gas and liquid sensing applications and are easily interrogated.read more
Citations
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Journal ArticleDOI
Hybrid InGaAsP-InP Mach-Zehnder Racetrack Resonator for Thermooptic Switching and Coupling Control
TL;DR: An InGaAsP-InP optical switch geometry based on electrical control of waveguide-resonator coupling is demonstrated, which enables a substantial reduction of the switching power, to a value of 26 mW in comparison with 40 mW for a conventional Mach-Zehnder interferometer switch.
Journal ArticleDOI
Lasing from a circular Bragg nanocavity with an ultrasmall modal volume
TL;DR: In this article, a radial Bragg reflector was used to demonstrate single-mode lasing at telecommunication wavelengths from a circular nanocavity employing a radial BRF.
DissertationDOI
InGaAsP-InP Semiconductor Microcavity Geometries for Annular Bragg Reflection, Optical Switching, and Sensing
TL;DR: In this paper, a ring-based optical microcavity geometries based upon the indium gallium arsenide phosphide/indium phosphide alloy semiconductor material system was designed and fabricated using a thin InGaAsP quantum well membrane.
Journal ArticleDOI
Annular Bragg resonators - the ultimate device for sensing, nonlinear optics and cavity quantum electrodynamics
TL;DR: The radial Bragg confinement decouples the modal volume and the Q and paves a new way for the realization of compact and low loss resonators as mentioned in this paper, which makes this class of devices an excellent tool for ultra-sensitive biochemical detection as well as for studies in nonlinear optics.
Journal ArticleDOI
Transverse Bragg Gratings and Lasers Fabricated by Electron Beam Lithography and Reactive Ion Etching
TL;DR: Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 - August 3, 2005 as mentioned in this paper, is presented in this paper.
References
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Book
Optical electronics in modern communications
TL;DR: In this article, a classical treatment of Quantum Optics Appendices is presented, which includes the Kramers-Kroning relations, the Electrooptic Effect in Cubic 43m Crystals, Noise in Traveling Wave Lasers Amplifiers, and Phase Conjugation in Photorefractive Media.
PatentDOI
Photonic crystal laser sources for chemical detection
Axel Scherer,Marko Loncar +1 more
TL;DR: In this paper, a photonic crystal lattice structure having a defect defines a suitable geometry for such a cavity (1000) and the analyte is introduced directly into a high optical field of the cavity (1002).
Journal ArticleDOI
Momentum space design of high-Q photonic crystal optical cavities.
Kartik Srinivasan,Oskar Painter +1 more
TL;DR: Numerical investigations using the finite-difference time-domain (FDTD) method predict that radiation losses can be significantly suppressed through these methods, culminating with a graded square lattice design whose total Q approaches 10;5 with a mode volume of approximately 0.25 cubic half-wavelengths in vacuum.
Journal ArticleDOI
Temperature Dependence of InP and GaAs Etching in a Chlorine Plasma
TL;DR: In this paper, the authors showed that etching in a chlorine plasma leaves multiple layer coverage of on (removable by washing with deionized water), and submonolayer levels of chlorine on.
Journal ArticleDOI
Lithographic tuning of a two-dimensional photonic crystal laser array
TL;DR: In this paper, a 10/spl times/10 array of optically pumped two-dimensional (2-D) photonic crystal defect lasers with varying lattice parameters is presented.