Journal ArticleDOI
Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors
S Beeby,JN Ross,N. M. White +2 more
Reads0
Chats0
TLDR
In this paper, an accelerometer fabricated by a combination of screen printing and silicon micromachining is reported, achieving a sensitivity of 16 pC g-1, which compares very favourably with the sensitivity of 0.15 pCg-1 reported for thin-film devices, and highlights the need to further improve the mechanical properties and consistency of the PZT layer.Abstract:
An accelerometer fabricated by a combination of screen printing and silicon micromachining is reported. This is the first device of its kind fabricated in this manner. Details of the finite element model (FEM) of the sensor and its method of fabrication are described. Initial results indicate a sensitivity of 16 pC g-1, which compares very favourably with a sensitivity of 0.15 pC g-1 reported for thin-film devices. Experimental results show a good level of agreement with the FEM results. Analysis of the results highlight the need to further improve the mechanical properties and consistency of the thick-film PZT layer.read more
Citations
More filters
Journal ArticleDOI
Piezoelectric MEMS sensors: state-of-the-art and perspectives
Srinivas Tadigadapa,Kiron Mateti +1 more
TL;DR: A comprehensive review of micromachined piezoelectric transducers can be found in this paper, where the authors present a critical assessment of the future trends and promise of this technology.
Journal ArticleDOI
A novel thick-film piezoelectric micro-generator
TL;DR: In this article, a vibration-powered micro-generator based on a screen printed piezoelectric material was proposed for remote sensor systems, which can generate 2 µW for a vibration frequency of only 80 Hz.
Journal ArticleDOI
Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers
TL;DR: In this paper, a microelectromechanical system (MEMS) accelerometer based on piezoelectric lead zirconate titanate (PZT) films with trampoline or annular diaphragm structures was designed, fabricated by bulk micromachining, and tested.
Journal ArticleDOI
Microsystem technologies for implantable applications
TL;DR: In this paper, the authors present a broad literature review of MST for implantable applications focused on the technical domain, and a case study on the role of microsystems for one clinical condition is presented.
Journal ArticleDOI
Micromachined high-g accelerometers : a review
TL;DR: In this article, a review of the research and commercial development of high-g micromachined accelerometers is presented, focusing on different highg sensing schemes and popular design templates.
References
More filters
Journal ArticleDOI
A novel micropump design with thick-film piezoelectric actuation
TL;DR: In this article, a silicon-based micropump is described, where passive cantilever valves are produced by boron etch stop and fusion bonding, and the valve action is simulated using ANSYS coupled with FLOW3D, and a differential equation for the combined actuation of membrane and valves is solved numerically with Maple.
Journal ArticleDOI
Silicon in mechanical sensors
TL;DR: The physical properties that make silicon so useful for these applications and the technology specific to the fabrication of sensors are discussed in this paper, where the authors describe the application of silicon to sensors in which strain is detected.
Journal ArticleDOI
Processing of PZT piezoelectric thick films on silicon for microelectromechancial systems
TL;DR: In this article, the effect of standard photolithography and micromachining upon the printed lead zirconate titanate (PZT) layer has been investigated, in particular the adhesion of the printed layer to the substrate and its internal structure after exposure to each process.
Journal ArticleDOI
Thick-film printing of PZT onto silicon
TL;DR: In this paper, the problem of lead-zirconate-titanate diffusion was solved by using a screen-printed barrier layer of IP211 (Heraeus), which also reduces the diffusion and prevents the conduction.
Journal ArticleDOI
Fabrication and characterization of a piezoelectric accelerometer
TL;DR: In this article, a high yield was obtained in a relatively simple process sequence for two electrode configurations with a direction selectivity better than 100 and a selectivity of 3 for acceleration in the horizontal direction, respectively.