Journal ArticleDOI
Design and fabrication of SOI technology based MEMS differential capacitive accelerometer structure
Nidhi Gupta,Nidhi Gupta,Shankar Dutta,Abha Panchal,Isha Yadav,Surender Kumar,Yashoda Parmar,Siva Rama Krishna Vanjari,K. K. Jain,D. K. Bhattacharya +9 more
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TLDR
In this paper, the authors discussed the design and fabrication of MEMS differential capacitive accelerometer (z-axis sensitive) structure, which consists of one each movable and reference capacitors in the single accelerometer die fabricated using highly conductive (p-type, resistivity: 0.001 µm) SOI substrate.Abstract:
This paper discusses the design and fabrication of MEMS differential capacitive accelerometer (z-axis sensitive) structure. The accelerometer structure consists of one each movable and reference capacitors in the single accelerometer die fabricated using highly conductive (p-type, resistivity: 0.001 Ω cm) SOI substrate. Resonant frequencies of the designed movable and reference capacitive structures were found to be 9.6 kHz and 150 kHz respectively. Corresponding rest capacitance (at 0 g) of both the capacitors was 2.21 pF. The movable and reference structures showed a deflection of 0.14 µm and 0.6 nm respectively at 50 g applied acceleration. Corresponding changes in capacitances of the movable and reference capacitors were 82.3 fF and < 0.33 fF respectively. The designed accelerometer showed a scale factor sensitivity of the movable capacitor was of ~ 1.65 fF/g. The device demonstrated a dynamic range of in − 17 g to 42 g with a full-scale non-linearity of ~ 3%. Corresponding measured scale factor sensitivity in the centrifuge test was found to be ~ 47 mV/g with an acceleration resolution of ~ 17 mg. The device exhibited cross-axis sensitivity of ~ 2% in the full-scale range. Measured 3 dB bandwidth (380 Hz) of the device matches reasonably with the simulated value (~ 400 Hz).read more
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Journal ArticleDOI
Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications
Wedyan Babatain,Sumana Bhattacharjee,Sumana Bhattacharjee,Aftab M. Hussain,Muhammad Mustafa Hussain,Muhammad Mustafa Hussain +5 more
TL;DR: In this article, the most mature sensor technologies with a broad range of applications in multiple fields and industries are discussed, including accelerometers, accelerometers are among the most widely used microelectromechanical system.
Journal ArticleDOI
High Sensitivity MEMS Accelerometer Using PZT-Based Four L-Shaped Beam Structure
TL;DR: In this paper , a micro-electromechanical system (MEMS) piezoelectric accelerometer was designed and manufactured with four L-shaped beams covered by Lead Zirconate Titanate (PZT) thin film with $1~\mu \text{m}$ in thickness which was deposited using sol-gel methods.
Journal ArticleDOI
Overview of residual stress in MEMS structures: Its origin, measurement, and control
Shankar Dutta,Akhilesh Pandey +1 more
TL;DR: In this article, the authors reviewed the origins of residual stress in MEMS fabrication processes and different techniques involved in testing and characterization of residual stresses are reviewed, and a brief overview of the possible route to minimize the residual stresses is also presented.
Journal ArticleDOI
Effect of growth and residual stress in AlN (0002) thin films on MEMS accelerometer design
Nidhi Gupta,Nidhi Gupta,Shankar Dutta,Akhilesh Pandey,Siva Rama Krishna Vanjari,Davinder Kaur +5 more
TL;DR: In this article, the growth and evolution of residual stresses in preferentially oriented aluminum nitride (AlN) layers on Si wafers by sputtering technique for the development of microelectro-mechanical system (MEMS) accelerometer was discussed.
Journal ArticleDOI
Nano electrical discharge machining – the outlook, challenges, and opportunities
TL;DR: In this paper, emerging trends toward miniaturization and growing demands have led to fabricating the nanofeatures size product for electronics, robotics, aeronautics, biomedical, automobile, and Bio-MEMS sectors.
References
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Journal ArticleDOI
Micromachined inertial sensors
TL;DR: Inertial sensors have seen a steady improvement in their performance, and today, microaccelerometers can resolve accelerations in the micro-g range, while the performance of gyroscopes has improved by a factor of 10/spl times/ every two years during the past eight years.
Journal ArticleDOI
MEMS inertial sensors: A tutorial overview
TL;DR: This tutorial provides an overview of MEMS technology and describes the essential features of the mechanical systems underlying the most common sensors accelerometers and gyroscopes, and reviews multisensor silicon MEMS/CMOS monolithic integration, which is driving the cost and form factor reduction behind the current proliferation of these devices.
Book
Analysis and Design Principles of MEMS Devices
TL;DR: This chapter discusses the basic mechanics of beam and diaphragm structures, and the applications of capacitive and piezoresistive sensing in MEMS devices.