Journal ArticleDOI
Design, fabrication and characterization of a piezoelectrically actuated bidirectional polymer micropump
Hagen Feth,F. Pothof,F. Thoma,Thomas L. Schmidt,Claas Mueller,Frank Goldschmidtboeing,Peter Woias +6 more
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TLDR
In this article, a piezoelectrically actuated fully polymeric three-chamber peristaltic micropump is presented, which is able to pump water with a flow rate of 4.8 ml/min.Abstract:
We present the design, fabrication and characterization of a new, piezoelectrically actuated fully polymeric three chamber peristaltic micropump. An optimized bimorph bending actuator has been designed to deform the polymer membranes in an optimal and most-efficient way. The piezoelectric actuators of the micropump are driven with actuation voltages of ±260 V. The pump has a total size of 46 × 18 × 4 mm, is produced by hot embossing and is assembled in a very simple way. The presented design is able to pump water with a flow rate of 4.8 ml/min and achieves a maximum back pressure of app. 200 mBar.read more
Citations
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Journal ArticleDOI
Principle and structure of a printed circuit board process–based piezoelectric microfluidic pump integrated into printed circuit board:
TL;DR: In this paper, microfluidic pumps that can be integrated into printed circuit board will provide a solution for further miniaturization and integrability and integration of printed circuit boards.
Journal ArticleDOI
A pressure-driven gas-diffusion/permeation micropump for self-activated sample transport in an extreme micro-environment
TL;DR: Pressure-driven gas-diffusion/permeation micropumps combine a number of superior properties all into one device, such as small size, simple structure, without the need for microfabrication procedures or external power consumption, strong transport capacity, homogeneous flow velocity, delivery capacity for both multi-phase microdroplets and single-phase plugs, long-distance transport, persistent pumping for both 3D microchannels and complex topological microsystems.
Journal ArticleDOI
Numerical study of structural parameters influencing flow in a lunular valveless pump.
TL;DR: In this paper, a Lunular Piezoelectric pump was designed to reduce the backflow phenomenon of valveless PPPs, and the experimental results showed that the maximum flow rate per unit area is 404.812 µl/min and maximum back pressure is 22.3 cmH2O.
Proceedings ArticleDOI
Design and simulation of high pressure piezohydraulic pump with active valves
TL;DR: In this paper, a high pressure piezo-hydraulic pump with active valve diaphragm actuation and three different flexurally amplified piezoelectric actuators are analyzed using ANSYS analysis software.
Journal ArticleDOI
Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry
TL;DR: It is shown that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage as well as the resonance curve of the fundamental vibration mode.
References
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Book
Theory of plates and shells
TL;DR: In this article, the authors describe the bending of long RECTANGULAR PLATES to a cycloidal surface, and the resulting deformation of shels without bending the plates.
Journal ArticleDOI
A review of micropumps
Daniel J. Laser,Juan G. Santiago +1 more
TL;DR: In this article, the authors survey progress over the past 25 years in the development of microscale devices for pumping fluids and attempt to provide both a reference for micropump researchers and a resource for those outside the field who wish to identify the best micropumps for a particular application.
Journal ArticleDOI
MEMS-Micropumps: A Review
TL;DR: Comparisons regarding pump size, flow rate, and backpressure will help readers to decide their proper design before starting a microfluidics project.
Journal ArticleDOI
MEMS-based micropumps in drug delivery and biomedical applications
TL;DR: There is still a need to incorporate various categories of micropumps in practical drug delivery and biomedical devices and this will continue to provide a substantial stimulus for micropump research and development in future.
Journal ArticleDOI
Micropumps—past, progress and future prospects
TL;DR: The area of micropumps is definitely one of those “long runners” as discussed by the authors, and the potential applications especially the combination of biochemical sensing and microfluidics has provided a substantial stimulus for micropump research and development in the past and will do so in the future.