Journal ArticleDOI
Design methodologies for robust nano-positioning
TLDR
The primary emphasis of the paper is on the robustness of the closed-loop device as these flexure-stage-based, piezoactuated nano-positioners are nonlinear and operate in diverse conditions.Abstract:
In this paper, we present a systematic control design and analysis for a two-dimensional nano-positioner. The primary emphasis of the paper is on the robustness of the closed-loop device as these flexure-stage-based, piezoactuated nano-positioners are nonlinear and operate in diverse conditions. To this end, we have used many tools from modern control theory to model devices and to quantify device resolution, bandwidth, and robustness. The implementation of this procedure for the simultaneous achievement of the objectives of robustness, high precision and high bandwidth is presented. The merits of the paradigm are demonstrated through experimental results.read more
Citations
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Journal ArticleDOI
A Survey of Control Issues in Nanopositioning
TL;DR: This paper presents an overview of nanopositioning technologies and devices emphasizing the key role of advanced control techniques in improving precision, accuracy, and speed of operation of these systems.
Journal ArticleDOI
Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey
TL;DR: The progresses of different modeling and control approaches for piezo-actuated nanopositioning stages are discussed and new opportunities for the extended studies are highlighted.
Journal ArticleDOI
Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues.
TL;DR: This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning, as well as future challenges and research topics.
Journal ArticleDOI
A review of feedforward control approaches in nanopositioning for high-speed spm
TL;DR: In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth as mentioned in this paper, which can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies.
Journal ArticleDOI
Design and Modeling of a High-Speed AFM-Scanner
Georg Schitter,Karl Johan Åström,Barry E. DeMartini,Philipp J. Thurner,Kimberly L. Turner,Paul K. Hansma +5 more
TL;DR: A second- and a fourth-order mathematical model of the scanner are derived that allow new insights into important design parameters and the performance of the new AFM is demonstrated by imaging a calibration grating and a biological sample at 8 frames/s.
References
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Book
Multivariable Feedback Control: Analysis and Design
TL;DR: This book presents a rigorous, yet easily readable, introduction to the analysis and design of robust multivariable control systems and provides the reader with insights into the opportunities and limitations of feedback control.
Journal ArticleDOI
A loop-shaping design procedure using H/sub infinity / synthesis
Duncan McFarlane,Keith Glover +1 more
TL;DR: In this article, a design procedure is introduced which incorporates loop shaping methods to obtain performance/robust stability tradeoffs, and a particular H/sub infinity / optimization problem to guarantee closed-loop stability and a level of robust stability at all frequencies.
Journal ArticleDOI
Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application
D. Croft,G. Shed,Santosh Devasia +2 more
TL;DR: In this paper, an inversion-based approach to compensate for hysteresis and vibrations in the piezodynamics has been proposed to improve both the accuracy and the speed of piezoactuators.
Journal ArticleDOI
Robust stabilization of normalized coprime factor plant descriptions with H/sub infinity /-bounded uncertainty
Keith Glover,Duncan McFarlane +1 more
TL;DR: In this article, the problem of robustly stabilizing a family of linear systems is explicitly solved in the case where the family is characterized by H/sub infinity / bounded perturbations to the numerator and denominator of the normalized left coprime factorization of a nominal system.
BookDOI
Handbook of micro/nano tribology
TL;DR: In this paper, B. Bhushan et al. describe the properties of solid surfaces and thin liquid films, and show that they can be modeled by Friction Force Microscopy.
Related Papers (5)
Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application
D. Croft,G. Shed,Santosh Devasia +2 more