Journal ArticleDOI
Dimensional metrology of micro parts by optical three-dimensional profilometry and areal surface topography analysis:
Nicola Senin,Liam Blunt,M. Tolley +2 more
- Vol. 226, Iss: 11, pp 1819-1832
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TLDR
In this paper, a novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as step-like structured surfaces.Abstract:
A novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as step-like structured surfaces. The approach is based on acquiring areal maps with a high-precision optical three-dimensional profilometer and on processing topography data with novel techniques obtained by merging knowledge and algorithms from surface metrology, dimensional metrology and computer vision/image processing. Thin-foil laser targets for ion acceleration experiments are selected as the test subject. The main issues related to general applicability and metrological performance of the methodology are identified and discussed.read more
Citations
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Book
Characterisation of Areal Surface Texture
TL;DR: In this article, the areal field parameters and areal feature parameters were compared to solar cell efficiency and the mechanical bond strength for copper on glass plating applications, using laser-structured cams and conrods.
Journal ArticleDOI
Review of the mathematical foundations of data fusion techniques in surface metrology
TL;DR: In this article, the authors reviewed the current data fusion methods and applications, with a focus on the mathematical foundations of the subject and common research questions in the fusion of surface metrology data.
Journal ArticleDOI
Uncertainty in measurement of surface topography
TL;DR: In this paper, a practical solution is found by considering the main aspects of uncertainty, as these are given in the recent ISO 25178 standards series, and applying these to a measured surface topography as a whole.
Journal ArticleDOI
Feature-based characterisation of surface topography and its application
TL;DR: Feature spectrum is proposed to organize surfaces, in order to help select the appropriate characterisation for different types of surface topographies and to achieve a more direct relationship between characterisation, manufacturing process and surface function.
Journal ArticleDOI
Morphologic segmentation algorithms for extracting individual surface features from areal surface topography maps
TL;DR: This work applies morphologic segmentation to a selected set of case studies of industrial relevance, involving structured, semi-structured and unstructured surfaces, where the main goal is not the assessment of surface texture, but the extraction of individual surface features.
References
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Journal ArticleDOI
A method for registration of 3-D shapes
Paul J. Besl,H.D. McKay +1 more
TL;DR: In this paper, the authors describe a general-purpose representation-independent method for the accurate and computationally efficient registration of 3D shapes including free-form curves and surfaces, based on the iterative closest point (ICP) algorithm, which requires only a procedure to find the closest point on a geometric entity to a given point.
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TL;DR: This completely revised second edition presents an introduction to statistical pattern recognition, which is appropriate as a text for introductory courses in pattern recognition and as a reference book for workers in the field.
Journal ArticleDOI
Forward Ion Acceleration in Thin Films Driven by a High-Intensity Laser
TL;DR: A collimated beam of fast protons, with energies as high as 1.5 MeV and total number of greater, similar10(9), confined in a cone angle of 40 degrees +/-10 degrees is observed when a high-intensity high-contrast subpicosecond laser pulse is focused onto a thin foil target.
Journal ArticleDOI
Dimensional micro and nano metrology
TL;DR: The need for dimensional micro and nano metrology is evident, and as critical dimensions are scaled down and geometrical complexity of objects is increased, the available technologies appear not sufficient as mentioned in this paper.
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