Journal ArticleDOI
Double grating phase stepping interferometry for testing aspherics
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TLDR
In this paper, a double-grating shearing interferometric technique has been developed to increase the dynamic range of shape measuring interferometry, and the interference takes place between two wavefronts diffracted from two high density sinusoidal gratings.Abstract:
In order to increase the dynamic range of shape measuring interferometry, a double-grating shearing interferometric technique has been developed. The interference takes place between two wavefronts diffracted from two high density sinusoidal gratings. Phase stepping by means of lateral shifting was introduced to obtain automatic fringe analysis. The surface shape is reconstructed from the first derivative of the phase distribution with the assumption of a rotationally symmetric object. This assumption is reasonable for testing diamond-turned surfaces. The measurement accuracy depends upon the surface size and the shear amount. The authors have experimentally measured a spherical diamond-turned mirror shape with an accuracy of lambda /2 ( lambda =0.6328 mu m), and a theoretical dynamic range of hundreds of lambda .read more
Citations
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Journal ArticleDOI
Wave-front analysis with high accuracy by use of a double-grating lateral shearing interferometer
TL;DR: A phase-stepped double-grating lateral shearing interferometer to be used for wave-front analysis is presented and it is shown that the accuracy of the two methods is comparable.
Journal ArticleDOI
A partial differential equation algorithm for wavefront reconstruction in lateral shearing interferometry
TL;DR: In this paper, an improved partial differential equation algorithm with high validity and accuracy has been proposed to reconstruct a wavefront from its phase differences in lateral shearing interferometry, which is based on a complete point to point mapping relationship between the wavefront phase and its differences via a least squares principle.
Journal ArticleDOI
Phase mask based interferometer: Operation principle, performance, and application to thermoelastic phenomena
TL;DR: In this article, a simple, versatile, sensitive optical interferometer based on diffractive optics is presented, which is ideal for time-resolved measurements in the picosecond through millisecond regimes.
Journal ArticleDOI
A new lateral shearing interferometer for precision surface measurement
TL;DR: In this article, a new lateral shearing interferometer is proposed for precision surface measurement, where a novel shear generator made of a single birefringence crystal plate is utilized.
Journal ArticleDOI
Spatial phase-shifting characteristic of double grating interferometer.
TL;DR: The spatial phase-shifting characteristic of double grating interferometer is presented, the explicit intensity distributions of interferograms produced by double gratings are derived with the scalar diffraction theory, and the stable phase shift is found between plus-first, zero and minus-first order interferogram.
References
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Book ChapterDOI
V Phase-Measurement Interferometry Techniques
TL;DR: The phase modulation in an interferometer can be induced by moving a mirror, tilting a glass plate, moving a grating, rotating a half-wave plate or analyzer, using an acoustooptic or electro-optic modulator, or using a Zeeman laser as mentioned in this paper.
Journal ArticleDOI
Digital wave-front measuring interferometry: some systematic error sources.
TL;DR: To study the occurrence of wave-front irregularities caused by dust particles a model has been developed and countermeasures derived which assure sufficient regularity of contour line plots, and the repeatability of the present experimental setup was better than λ/200 within the 3σ limits.
Journal ArticleDOI
Real-time atmospheric compensation
TL;DR: In this paper, an active optical imaging system capable of correcting optical wave-front errors in real time at frequencies in the kilohertz range was developed, which can be applied to apertures of any size; experimental results were shown for a system with 21 correction zones.
Journal ArticleDOI
Matrix formulation of the reconstruction of phase values from phase differences
TL;DR: The phase reconstruction problem is formulated in terms of a vector-matrix multiplication and it is shown that previous solution methods are equivalent to this general description, and the errors in reconstruction are analyzed.
Journal ArticleDOI
Evaluation of large aberrations using a lateral-shear interferometer having variable shear.
Matthew P. Rimmer,James C. Wyant +1 more
TL;DR: Results indicate that small wavefront aberrations can be measured as accurately with the lateral-shear interferometer as with the Twyman-Green interferometers and that aberration that cannot be measured at all with a Twy man-Greeninterferometer can be measurement to about 1% accuracy or better.