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Journal ArticleDOI

Electrical and optical properties of semi-insulating polycrystalline silicon thin films: the role of microstructure and doping

Salvatore Lombardo, +1 more
- 15 Dec 1996 - 
- Vol. 17, Iss: 8, pp 281-336
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TLDR
In this article, the relationship between microstructure and electrical conductivity in semi-insulating polycrystalline silicon (SIPOS) with oxygen concentrations in the 2-35 at.
Abstract
We have investigated the relationship between microstructure and electrical conductivity in semi-insulating polycrystalline silicon (SIPOS) with oxygen concentrations in the 2–35 at.% range and the effect of doping with boron, phosphorus, arsenic and erbium by ion implantation. SIPOS thin films are mixtures of silicon and silicon oxide phases. The chemical and morphological evolution of these phases upon annealing is emphasized. Electrical conductivity measurements are interpreted in terms of a physical model containing few free parameters related to the material microstructure. A direct extension of this model explains also the conductivity increase in SIPOS doped with elements of the third or the fifth group. In the last part of the paper, data of electroluminescence at 1.54 μm in Er-implanted SIPOS due to intra-4f transitions of the Er3+ ion are shown and discussed.

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Citations
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Journal ArticleDOI

Erbium in silicon

TL;DR: A review of the current state of what remains an active field can be found in this article, summarizing results from a range of studies conducted over the last few years, and pointing to further developments by considering the prospects for successful photonic integration of erbium and silicon.
Journal ArticleDOI

Silicon Quantum Dots in a Dielectric Matrix for All-Silicon Tandem Solar Cells

TL;DR: In this article, a wide-bandgap silicon-based thin-film material by using quantum confinement in silicon quantum dots and to utilize this in complete thin-filament silicon based tandem cell, without the constraints of lattice matching, but which nonetheless gives an enhanced efficiency through the increased spectral collection efficiency.
Journal ArticleDOI

Valence band offset in heterojunctions between crystalline silicon and amorphous silicon (sub)oxides (a-SiOx:H, 0 < x < 2)

TL;DR: In this paper, the hole contact of a-SiO2/c-Si interface was investigated for heterojunction solar cells, and the authors showed that high-bandgap aSiOx:H is unsuitable for hole contact due to electronic transport hindrance resulting from the large ΔEV.
Journal ArticleDOI

Correlation of dot size distribution with luminescence and electrical transport of Si quantum dots embedded in SiO2

TL;DR: In this article, the electrical transport and luminescence of Si dots embedded in SiO 2 have been investigated and it has been shown that the data of luminecence and electrical transport appear correlated with the dot size distribution.
Journal ArticleDOI

Absorption and transport properties of Si rich oxide layers annealed at various temperatures

TL;DR: In this article, optical and infrared transmission measurements prove phase separation upon annealing at 700 and 1000 °C, respectively, and growth of amorphous Si nanoparticles with average size 2.6 eV.
References
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Book

Electronic processes in non-crystalline materials

TL;DR: The Fermi Glass and the Anderson Transition as discussed by the authorsermi glass and Anderson transition have been studied in the context of non-crystalline Semiconductors, such as tetrahedrally-bonded semiconductors.
Book

Semiconductor Material and Device Characterization

TL;DR: In this article, the authors present a characterization of the resistivity of a two-point-versus-four-point probe in terms of the number of contacts and the amount of contacts in the probe.
Journal ArticleDOI

The electrical properties of polycrystalline silicon films

TL;DR: In this article, Boron doses of 1×1012-5×1015/cm2 were implanted at 60 keV into 1-μm-thick polysilicon films and Hall and resistivity measurements were made over a temperature range −50-250 °C.
Journal ArticleDOI

The Electrical Resistance of Binary Metallic Mixtures

TL;DR: In this paper, a theory for a random mixture is given, based on the assumption that each crystal acts as if surrounded by a homogeneous medium whose properties are those of the mixture.
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