Fabrication of precise microchannels using a side-insulated tool in a spark assisted chemical engraving process

TLDR: In this paper, a room temperature coated thick insulating film for improving the quality of the microchannels realized using a Spark assisted chemical engraving (SACE) process is presented.

Abstract: Microfluidics is an emerging field giving rise to a number of scientific developments with wide applications in proteomics, genomics, DNA analysis, drug delivery systems and lab-on-a-chip. Among the various microfluidic structures, microchannels form an integral part of Lab-on-a-chip devices for clinical diagnosis. The geometrical accuracy and surface finish quality of the microchannels affect the performance of microfluidic systems, thereby demanding a precise microfabrication technique for realizing microchannels. Spark assisted chemical engraving (SACE) is an effective hybrid micromachining technique used for micro-structuring non-conducting substrates such as glass and ceramics. In the present work, we report on a room temperature coated thick insulating film for improving the quality of the microchannels realized using a SACE process. The insulator film coated around a tool electrode confines the spark discharges only to the bottom surface of the tool. Moreover, the proposed insulator coating...