Journal ArticleDOI
Fabrication of X-ray zone plates with a minimum zone width smaller than 100 nm by electron beam lithography
H Aritome,K Nagata,Susumu Namba +2 more
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TLDR
In this paper, a partial transmission Fresnel zone plate (PT-FZP) is proposed, in which part of the normally transparent zones is transparent, and the distance between transparent zones can be set large so that a zone plate with very high resolution can be fabricated by electron beam lithography because the proximity effect due to electron scattering in resist layer can be reduced.About:
This article is published in Microelectronic Engineering.The article was published on 1985-12-15. It has received 11 citations till now. The article focuses on the topics: Zone plate & Proximity effect (electron beam lithography).read more
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Journal ArticleDOI
X-ray microscopy
TL;DR: The main advances have been in intense sources, principally synchrotron radiation and plasma sources and in X-ray optical components such as grazing incidence reflectors, multilayer mirrors and zone plates as mentioned in this paper.
Journal ArticleDOI
Operation of a normal‐incidence transmission grating monochromator at ALLADIN (invited)
TL;DR: A transmission grating monochromator was constructed and operated on the ALLADIN storage ring in Wisconsin in March and June of 1987 as mentioned in this paper, which employed a singlebent focusing mirror between the source and the exit slit.
Proceedings ArticleDOI
Zone plate x-ray microscope using a laser plasma source
Hiroaki Aritome,Shigeru Nakayama,Katsumi Mizunoe,Guan-ming Zeng,Hiroyuki Daido,Masahiro Nakatsuka,Sadao Nakai +6 more
TL;DR: In this article, an image of the #1000 copper mesh is obtained by a single x-ray pulse at a magnification of 10 by the CCD, in the case of a singe pulse, the magnification is limited so that enough photons are incident on a pixel of the camera, thus the spatial resolution is limited.
Proceedings ArticleDOI
Electron beam lithography and nanometer structures-fabrication of microzone plates
V. Bogli,P. Unger,H. Beneking +2 more
TL;DR: In this article, a step by step improvement of fabricated microzone plates with an outermost zone width of 50 nm has been shown, where a thin titanium intermediate layer is used as a stable mask to generate ion milled gold absorber rings with very steep walls.
References
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Journal ArticleDOI
The Göttingen X-ray microscopes
B. Niemann,D. Rudolph,G. Schmahl +2 more
TL;DR: In this article, an X-ray microscope with a zone plate linear monochromator as a condenser system and high resolution micro zone plate is described, and images with 50 nm resolution have been made.
Journal Article
Practical aspects of microfabrication in the 100 nm regime
TL;DR: The fabrication of microstructures with minimum dimensions below 100 nm introduces several additional problems not normally associated with electron-beam lithography at the 1/2 to 1 μm level as discussed by the authors.
Journal ArticleDOI
Practical aspects of microfabrication in the 100 nm regime
TL;DR: The fabrication of microstructures with minimum dimensions below 100 nm introduces several additional problems not normally associated with electron-beam lithography at the 1/2 to 1 μm level as discussed by the authors.