First measurements of the number size distribution of 1–2 nm aerosol particles released from manufacturing processes in a cleanroom environment

TLDR: In this paper, a measurement campaign was conducted to observe a potential formation and/or release of aerosol particles related to manufacturing processes inside a cleanroom, where atomic layer deposition (ALD), sputtering, and lithography processes were conducted.

Abstract: This study was conducted to observe a potential formation and/or release of aerosol particles related to manufacturing processes inside a cleanroom. We introduce a novel technique to monitor airborne sub 2 nm particles in the cleanroom and present results from a measurement campaign during which the total particle number concentration (>1 nm and >7 nm) and the size resolved concentration in the 1 to 2 nm size range were measured. Measurements were carried out in locations where atomic layer deposition (ALD), sputtering, and lithography processes were conducted, with a wide variety of starting materials. During our campaign in the clean room, we observed several time periods when the particle number concentration was 105 cm−3 in the sub 2 nm size range and 104 cm−3 in the size class larger than 7 nm in one of the sampling locations. The highest concentrations were related to the maintenance processes of the manufacturing machines, which were conducted regularly in that specific location. Our measur...