Journal ArticleDOI
Holographic projection of microcircuit patterns
TLDR
In this paper, the real image formed by a hologram has been investigated experimentally with a view to overcoming the disadvantages of the present contact-print method of manufacturing microcircuits.Abstract:
The resolution of the real image formed by a hologram has been investigated experimentally with a view to overcoming the disadvantages of the present contact-print method of manufacturing microcircuits. A resolution of 4μm over an area of 2.5 cm diameter has been obtained so far.read more
Citations
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Journal ArticleDOI
The use of photoresist as a holographic recording medium.
M J Beesley,J G Castledine +1 more
TL;DR: It is shown that the effects of the variable characteristic of the resist can be alleviated by monitoring diffraction efficiency during development by reducing exposure times and increasing the signal-to-noise ratio of the image.
Journal ArticleDOI
Non-conventional techniques for optical lithography
Journal ArticleDOI
A technique for projection x-ray lithography using computer-generated holograms
TL;DR: In this article, a method for projected x-ray images with x-rays by means of a transmission hologram is described. But the form of the hologram can be computed by an algorithm that eliminates the unwanted signals normally present as systematic errors in in-line holographic images.
Patent
X-ray lithography using holographic images
TL;DR: In this article, a holgraphic image of a desired circuit pattern is projected onto a wafer or other image-receiving substrate to allow recording of the desired image in photoresist material.
Journal ArticleDOI
Image projection with nonlinear optics
M. D. Levenson,K. Chiang +1 more
TL;DR: In this paper, the authors review the basics of conjugate wavefront generation and its relationship to holography, and propose applications in fine-line lithography, which can project images in a manner similar to conventional optical systems.
References
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Journal ArticleDOI
Reconstructed Wavefronts and Communication Theory
Emmett N. Leith,Juris Upatnieks +1 more
TL;DR: In this paper, a two-step imaging process is described from a communication-theory viewpoint, which consists of three well-known operations: a modulation, a frequency dispersion, and a square-law detection.