Journal ArticleDOI
Improved charge amplifier using hybrid hysteresis compensation.
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TLDR
A novel charge amplifier, with a robust feedback circuit and a method for compensating piezoelectric actuator's hysteresis at low frequencies is presented.Abstract:
We present a novel charge amplifier, with a robust feedback circuit and a method for compensating piezoelectric actuator's hysteresis at low frequencies. The amplifier uses a modified feedback circuit which improves robustness to the addition of series load impedance such as in cabling. We also describe a hybrid hysteresis compensation method for enabling the charge amplifier to reduce hysteresis at low frequencies. Experimental results demonstrate the utility of the new amplifier design.read more
Citations
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Journal ArticleDOI
Piezoelectric Inertia Motors—A Critical Review of History, Concepts, Design, Applications, and Perspectives.
TL;DR: A critical overview of the historical development, functional principles, and related terminology of stick-slip motors can be found in this article, where the most relevant aspects regarding their design are discussed, including aspects of control and simulation.
Journal ArticleDOI
Design and control of a piezoelectric driven reticle assist device for prevention of reticle slip in lithography systems
TL;DR: In this article, a reticle assist device is proposed to eliminate reticle slip by compensating better than 95% of the inertial loads when tested in a bench-top tester.
Journal ArticleDOI
A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation
TL;DR: The current states, findings, and outcomes on hysteresis modeling and control in terms of achievable bandwidth and accuracy are discussed, and future challenges and the scope of possible research are presented to pave the way to video rate atomic force microscopy.
Dissertation
Konzeption, Ansteuerung und Eigenschaften schneller piezoelektrischer Trägheitsmotoren
TL;DR: In this article, a detailed analysis of the verbreitete Betrieb of Tragheitsmotors with Haft-and Gleitphasen is presented, in which the authors show that the Verhalten bei anregung with these signals is bezuglich Geschwindigkeit, Effizienz, Haltbarkeit and Kraft verglichen.
Journal Article
A Simple Way to Reduce Hysteresis and Creep When Using Piezoelectric Actuators : Electrical Properties of Condensed Matter
Hiroshi Kaizuka,Byron Siu +1 more
TL;DR: In this article, a simple way to compensate for hysteresis and creep in piezoelectric actuators was proposed by inserting a capacitor in series with the actuator.
References
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Journal ArticleDOI
Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application
D. Croft,G. Shed,Santosh Devasia +2 more
TL;DR: In this paper, an inversion-based approach to compensate for hysteresis and vibrations in the piezodynamics has been proposed to improve both the accuracy and the speed of piezoactuators.
Journal ArticleDOI
Tracking control of a piezoceramic actuator
Ping Ge,Musa Jouaneh +1 more
TL;DR: The results show that the tracking control performance is greatly improved by augmenting the feedback loop with a model of hysteresis in the feedforward loop.
Journal ArticleDOI
Improving the linearity of piezoelectric ceramic actuators
C.V. Newcomb,I. Flinn +1 more
TL;DR: In this article, the linearity of a piezoelectric ceramic actuator may be improved if the applied electric charge, rather than the applied voltage, is varied to control the extension.
Journal ArticleDOI
A Lumped Parameter Electromechanical Model for Describing the Nonlinear Behavior of Piezoelectric Actuators
TL;DR: In this article, a lumped-parameter model of a piezoeletric stack actuator was developed to describe actuator behavior for purposes of control system analysis and design, and in particular for control applications requiring accurate position tracking performance.
Journal ArticleDOI
Compensation of Scanner Creep and Hysteresis for AFM Nanomanipulation
TL;DR: Experimental results show that this approach effectively reduces the spatial uncertainties associated with creep and hysteresis, and supports automated, computer-controlled manipulation operations that otherwise would fail.