Proceedings ArticleDOI
Improvement of hot switching lifetime in MEMS DC switches using a drain voltage-sustaining capacitor
Yong-Ha Song,Min-Woo Kim,Sang Joon Ahn,Jun-Bo Yoon +3 more
- pp 546-549
Reads0
Chats0
TLDR
In this paper, a drain voltage-sustaining capacitor is introduced to eliminate the electric potential difference between the suspended beam and the drain electrode at the switch "opening" instant.Abstract:
Reliability in hot switching operations of MEMS DC switches is enhanced by introducing a drain voltage-sustaining capacitor, which leads to electric field-less or arc-less switching operations. The role of the capacitor is to eliminate the electric potential difference between the suspended beam and the drain electrode at the switch “opening” instant. In the case of a pure Au-Au contact, we have experimentally demonstrated that the lifetime of conventional MEMS switches with the suggested method was improved dramatically, by an order of magnitude, in the relatively high electric-field hot switching condition. We clearly observed material transfer at failure in the device without the capacitor, whereas stiction was the main failure mechanism in the device with the capacitor. Owing to the simplicity of the proposed method, it can be adopted in any type of MEMS DC switches in order to greatly enhance the switch lifetime.read more
Citations
More filters
Book ChapterDOI
Micro and Nanoelectromechanical Contact Switches for Logic, Memory, and Power Applications
TL;DR: In this paper, a wide range of technologies for contact-based microelectromechanical system (MEMS)/nanoelectric system (NEMS) switches and their applications to logic, memory, and power devices are described.
Dissertation
Design and modelling of a contact-less piezoelectric RF MEMS switch
TL;DR: In this article, the authors investigate and validate a concept for a contact-less MEMS switch, which uses a variable capacitance principle, avoiding the need for contact during switching, and a fabrication process is developed to produce a device in silicon, and additional electrical measurements are carried out on a prototype version of this silicon structure (fabricated without piezoelectric material).
Dissertation
Modeling and Analysis of Scalable Arcless Micromechanical Switches for Power Applications
Journal ArticleDOI
4 W Power MEMS Relay With Extremely Low Contact Resistance: Theoretical Analysis, Design and Demonstration
Su-Bon Kim,Yong-Hoon Yoon,Yong-Bok Lee,Kwang-Wook Choi,Min-Seung Jo,Hyun-Woo Min,Jun-Bo Yoon +6 more
TL;DR: In this paper, a 4 W power microelectromechanical systems (MEMS) relay with a contact-force-maximizing structure in a dual-contact material system was reported.
Proceedings ArticleDOI
4 W Dual-Contact Material MEMS Relay with a Contact Force Maximizing Structure
Su-Bon Kim,Yong-Hoon Yoon,Yong-Bok Lee,Kwang-Wook Choi,Min-Seung Jo,Hyun-Woo Min,Jun-Bo Yoon +6 more
TL;DR: In this article, the authors reported an unprecedented 4 W MEMS relay that utilizes a dual contact-material system and a contact force maximizing structure, which achieved extremely low contact resistance.
References
More filters
Journal ArticleDOI
Micromechanical membrane switches on silicon
TL;DR: In this paper, the authors describe the design, fabrication, operating behavior, and potential applications of voltage-controlled, micromechanical switches, which are basically extremely small, electrostatically controlled mechanical relays, typically less than 100 µm long.
Journal ArticleDOI
Atomic emission from a gold scanning-tunneling-microscope tip.
TL;DR: In this paper, a gold scanning-tunneling microscope tip was used as a solid-state emission source for directly depositing nanometer-size gold structures on Ag(111) surfaces.
Journal ArticleDOI
Fundamental studies of Au contacts in MEMS RF switches
TL;DR: In this article, the effects of contact force and electric current on contact resistance (R), microadhesion, and reliability/durability of hot-switched gold (Au) contacts were conducted using a micro/nanoadhesion apparatus as a switch simulator.
Journal ArticleDOI
Low-actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles
TL;DR: In this article, the performance and lifetime of a metal-to-metal shunt RF MEMS switch fabricated on an SI-GaAs substrate is investigated. And the authors have developed a cold switching test method to identify the root cause of sticking as a failure mechanism.
Journal ArticleDOI
Effect of nanoscale heating on electrical transport in RF MEMS switch contacts
Brian D. Jensen,Linda L.-W. Chow,Kuangwei Huang,Kazuhiro Saitou,John L. Volakis,Katsuo Kurabayashi +5 more
TL;DR: In this paper, contact heating in microelectromechanical systems (MEMS) switches with contact spot sizes less than 100 nm in diameter was explored and experiments were conducted to demonstrate that contact heating causes a drop in contact resistance.