scispace - formally typeset
Open AccessJournal ArticleDOI

Internal Stress and Young's Modulus of Vacuum Deposited Germanium Films

Akira Kikuchi, +2 more
- 01 Jan 1981 - 
- Vol. 24, Iss: 4, pp 259-262
Reads0
Chats0
About: 
This article is published in Shinku.The article was published on 1981-01-01 and is currently open access. It has received 1 citations till now. The article focuses on the topics: Young's modulus & Germanium.

read more

Citations
More filters
Journal ArticleDOI

Mechanical properties of metal and compound films

Akira Kinbara, +2 more
- 01 Aug 1986 - 
TL;DR: In this paper, the effect of the substrate temperature and ion bombardment on the adhesion of metal and compound films has been investigated and the correlation between these quantities is discussed and the results on internal stress and Young's modulus were determined by simultaneous in situ measurements during film deposition.
Related Papers (5)

Stress and thermomechanical properties of amorphous hydrogenated germanium thin films deposited by glow discharge

Francisco C. Marques, +4 more
- 10 Dec 1998 - 

Fluctuation Mechanism of Mechanical Properties of Electroplated-Copper Thin Films Used for Three Dimensional Electronic Modules

Hideo Miura, +2 more
- 01 Jan 2007 - 

The mechanical properties and microstructure of plasma enhanced chemical vapor deposited silicon nitride thin films

J. Ashley Taylor
- 01 Jul 1991 - 

Residual stress characterization of polycrystalline 3C-SiC films on Si(100) deposited from methylsilane

Fang Liu, +3 more
- 07 Jul 2009 - 

Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor deposition

Xiao-An Fu, +3 more
- 01 Dec 2005 -