Journal ArticleDOI
Kinetic suppression of islanding in impurity‐mediated heteroepitaxial growth of germanium on silicon
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TLDR
In this article, the impurity-mediated suppression of islanding in molecular beam epitaxy growth experiments of Ge on Si(100) can be understood by a kinetic reduction of surface diffusion.Abstract:
The impurity‐mediated suppression of islanding in molecular beam epitaxy growth experiments of Ge on Si(100) can be understood by a kinetic reduction of surface diffusion. Besides the energy barrier for surface diffusion, an energy barrier for a site exchange mechanism between Ge adatoms and the impurity atoms also has to be considered in a simple phenomenological approach that describes this effect. We found satisfactory agreement with different experimental results, like dependence of kinetic suppression of islanding on temperature and/or submonolayer coverage with impurities and germanium flux density.read more
Citations
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In situ monitoring of strain relaxation during antimony‐mediated growth of Ge and Ge1−y Cy layers on Si(001) using reflection high energy electron diffraction
H. J. Osten,J. Klatt +1 more
TL;DR: In this article, reflection high energy electron diffraction (RHEED) was used to monitor the inplane lattice spacing of the growing layer by measuring the distances between diffraction features during growth and applying an appropriate mathematical algorithm.
Journal ArticleDOI
Antimony-mediated growth of epitaxial Ge1−yCy layers on Si(001)
TL;DR: Ge 1− y C y layers were grown epitaxially on Si(001) with molecular beam epitaxy as mentioned in this paper, and the Stranski-Krastanov islanding can be completely suppressed by using the surfactant growth technique.
Journal ArticleDOI
Considerations about the critical thickness for pseudomorphic Si1-xGex growth on Si(001)
TL;DR: In this paper, the critical thickness for perfect two-dimensional pseudomorphic Si1-xGex layer growth depends on two different mechanisms for strain relief: misfit dislocations and Stranski-Krastanov islands.
Journal ArticleDOI
Supersaturated carbon in silicon and silicon/germanium alloys
TL;DR: In this article, the growth and properties of SiGeC and Si1 − x − yGexCy alloys pseudomorphically strained on Si(001) were investigated. And an atomistic picture of a fully strain-compensated SiGeCy layer was presented.
Journal ArticleDOI
Surfactant-mediated Stranski–Krastanov islands
TL;DR: In this article, a criterion for the growth of Stranski-Krastanov islands mediated by surfactants is obtained, which involves that surfactant decrease the island nucleation barrier.
References
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Journal ArticleDOI
Dislocation-free Stranski-Krastanow growth of Ge on Si(100).
D. J. Eaglesham,M. Cerullo +1 more
TL;DR: It is shown that the islands formed in Stranski-Krastanow (SK) growth of Ge on Si(100) are initially dislocation free, and the limiting critical thickness of coherent SK islands is shown to be higher than that for 2D growth.
Journal ArticleDOI
Surfactants in epitaxial growth.
TL;DR: In this article, the role of surface active species (surfactants) in heteroepitaxial growth was investigated and the use of a segregating surfactant was proposed to reduce the surface free energies of A and B and suppress island formation, as demonstrated in the growth of Si/Ge/Si(001) with a monolayer of As.
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Strain relaxation kinetics in Si1−xGex/Si heterostructures
TL;DR: In this article, a semi-empirical kinetic model is presented which maps out the thermal budget for processing of Si1−xGex/Si heterostructures through epitaxial growth and postgrowth anneals.
Journal ArticleDOI
Growth morphology and the equilibrium shape: The role of ‘‘surfactants’’ in Ge/Si island formation
TL;DR: Sb impurities favor large flat islands which would lead to earlier island coalescence and can aid planar growth, while In (though otherwise a good «surfactant») leaves the film faceted.
Journal ArticleDOI
Microstructure and strain relief of Ge films grown layer by layer on Si(001).
TL;DR: The microstructure of Ge films grown layer by layer on Si(001) surfaces is studied, demonstrating that the so-called critical thickness has to take into account the formation energy of the strain-relieving defects (in general, dislocations), and not only the energy to move the defects, as has generally been done up to now.