Journal ArticleDOI
Miniature all-silica fiber optic pressure and acoustic sensors
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TLDR
A miniature diaphragm-based Fabry-Perot (F-P) interferometric fiber optic sensor fabricated by novel techniques for pressure or acoustic wave measurement that is only approximately 0.32 mm in diameter is presented.Abstract:
We present a miniature diaphragm-based Fabry-Perot (F-P) interferometric fiber optic sensor fabricated by novel techniques for pressure or acoustic wave measurement that is only approximately 032 mm in diameter By choosing different diaphragm thicknesses and effective diameters, we obtain a sensor measurement range from 5 to 10,000 psi (1 psi = 5172 Torr) and a frequency response up to 2 MHz In addition, the sensor's F-P cavity can be set from micrometers to millimeters with a precision of several nanometers With the all-silica structure, the sensor is reliable, biocompatible, and immune to electromagnetic interference and has high-temperature sensing capabilityread more
Citations
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Journal ArticleDOI
Miniature fiber-optic high temperature sensor based on a hybrid structured Fabry-Perot interferometer
TL;DR: A miniature Fabry-Perot (FP) interferometric fiber-optic sensor suitable for high-temperature sensing is proposed and demonstrated and shows that the thermal-optics effect of the cavity material is much more appreciable than its thermal expansion.
Journal ArticleDOI
Fiber-Optic Fabry–Pérot Acoustic Sensor With Multilayer Graphene Diaphragm
TL;DR: In this paper, a fiber-optic Fabry-Perot acoustic sensor with a ~100-nmthick multilayer graphene diaphragm is reported, which demonstrates a pressureinduced deflection of 1100 nm/kPa and a noise equivalent acoustic signal level of ~ 60 μPa/Hz1/2 at the frequency of 10 kHz.
Journal ArticleDOI
Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm
TL;DR: This paper presents an all-silica miniature optical fiber pressure/acoustic sensor based on the Fabry-Perot (FP) interferometric principle that has great potential to be used as a non-intrusive pressure sensor in a variety of sensing applications.
Journal ArticleDOI
The Optical Fiber Tip: An Inherently Light-Coupled Microscopic Platform for Micro- and Nanotechnologies
TL;DR: This review presents a broad overview of strategies for patterning the flat tip of an optical fiber, which include self-assembly, numerous lithographies, through-fiber patterning, hybrid techniques, and strategies for mass manufacture.
Journal ArticleDOI
Pressure Sensor Based on the Fiber-Optic Extrinsic Fabry-Perot Interferometer
Qingxu Yu,Xinlei Zhou +1 more
TL;DR: In this article, a signal demodulation algorithm based on the cross correlation and mean square error (MSE) estimation has been proposed for retrieving the cavity length of EFPI.
References
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Journal ArticleDOI
All-fused-silica miniature optical fiber tip pressure sensor
TL;DR: An all-fused-silica pressure sensor fabricated directly onto a fiber tip of 125 microm diameter is described, which may be suitable for medical diagnostics, environmental monitoring, and other industrial applications.
Journal ArticleDOI
Fiber Fabry-Perot Sensors For Detection Of Partial Discharges in Power Transformers
TL;DR: Test results indicate that these fiber optic acoustic sensors are capable of faithfully detecting acoustic signals propagating inside transformer oil with high sensitivity and wide bandwidth.
Journal ArticleDOI
Miniature fiber-optic pressure sensor
Yizheng Zhu,Anbo Wang +1 more
TL;DR: In this article, a fiber-optic pressure sensor was fabricated by simple techniques involving only fusion splicing, cleaving, and wet chemical etching, which measured only 125 /spl mu/m in diameter.
Journal ArticleDOI
Self-calibrated interferometric-intensity-based optical fiber sensors
TL;DR: In this article, a self-calibrated interferometric-intensity-based optical fiber sensor is proposed, which combines fiber interferometry and intensity-based devices into a single sensor system.
Journal ArticleDOI
A novel MEMS pressure sensor fabricated on an optical fiber
TL;DR: In this paper, the authors describe the fabrication and initial testing of a novel optically interrogated, microelectromechanical system (MEMS) pressure sensor in which the entire MEMS structure is fabricated directly on an optical fiber and a new micromachining process for use on a flat fiber end face that includes photolithographic patterning, wet etching of a cavity and anodic bonding of a silicon diaphragm is utilized.