Journal ArticleDOI
Miniature fiber-optic pressure sensor
Yizheng Zhu,Anbo Wang +1 more
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TLDR
In this article, a fiber-optic pressure sensor was fabricated by simple techniques involving only fusion splicing, cleaving, and wet chemical etching, which measured only 125 /spl mu/m in diameter.Abstract:
This letter presents a miniature fiber-optic pressure sensor fabricated directly on the tip of a fiber. The sensor measures only 125 /spl mu/m in diameter. A Fabry-Pe/spl acute/rot cavity and a thin silica diaphragm are fabricated by simple techniques involving only fusion splicing, cleaving, and wet chemical etching. Interference pattern of the sensor is analyzed and issues in sensor design are discussed. The sensor has been tested for static pressure response, showing excellent repeatability and no hysteresis. Its all-fused-silica structure lends it great potential for high-temperature pressure measurements. Pressure testing results at 530/spl deg/C are given. The sensor may also find uses in medical applications.read more
Citations
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Recent progress in fiber-optic extrinsic Fabry–Perot interferometric sensors
TL;DR: In this article, the optical amplification technology is adopted into the EFPI sensor system to enhance the interferometric signal considerably, and both spatial-frequency multiplexing and coarse-wavelength division multiple-xing technologies are demonstrated for the Fizeau sensor in order to realize the measurement of multiple parameters such as displacement, transverse load, static strain, temperature, and vibration.
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A review on optical fiber sensors for environmental monitoring
TL;DR: In this article, the optical fiber sensors employed in environmental monitoring are summarized for understanding of their sensing principles and fabrication processes, followed by discussion on the potentials of OFS in manufacturing.
Journal ArticleDOI
All-fused-silica miniature optical fiber tip pressure sensor
TL;DR: An all-fused-silica pressure sensor fabricated directly onto a fiber tip of 125 microm diameter is described, which may be suitable for medical diagnostics, environmental monitoring, and other industrial applications.
Journal ArticleDOI
Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm
TL;DR: This paper presents an all-silica miniature optical fiber pressure/acoustic sensor based on the Fabry-Perot (FP) interferometric principle that has great potential to be used as a non-intrusive pressure sensor in a variety of sensing applications.
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The Optical Fiber Tip: An Inherently Light-Coupled Microscopic Platform for Micro- and Nanotechnologies
TL;DR: This review presents a broad overview of strategies for patterning the flat tip of an optical fiber, which include self-assembly, numerous lithographies, through-fiber patterning, hybrid techniques, and strategies for mass manufacture.
References
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Journal ArticleDOI
A novel MEMS pressure sensor fabricated on an optical fiber
TL;DR: In this paper, the authors describe the fabrication and initial testing of a novel optically interrogated, microelectromechanical system (MEMS) pressure sensor in which the entire MEMS structure is fabricated directly on an optical fiber and a new micromachining process for use on a flat fiber end face that includes photolithographic patterning, wet etching of a cavity and anodic bonding of a silicon diaphragm is utilized.
Journal ArticleDOI
Novel data processing techniques for dispersive white light interferometer
Bing Qi,Gary Pickrell,Juncheng Xu,Po Zhang,Yuhong Duan,Wei Peng,Zhenyu Huo,Hai Xiao,Russell G. May,Anbo Wang +9 more
TL;DR: In this article, a data processing method for demodulating the information from the interference spectrum of a white light system is presented, and a compact white light interferometric system employing this algorithm has been developed, combined with fiber Fabry-Perot sensors.
Journal ArticleDOI
Reproducible Fabrication Technique of Nanometric Tip Diameter Fiber Probe for Photon Scanning Tunneling Microscope
TL;DR: In this paper, a nanometric tip diameter fiber probe for photon scanning tunneling microscopes (PSTM) was fabricated by selective chemical etching of GeO2-doped optical fibers.
Journal ArticleDOI
MICROMACHINED 125μm DIAMETER ULTRA MINIATURE FIBER-OPTIC PRESSURE SENSOR FOR CATHETER
TL;DR: In this article, a miniaturized fiber-optic pressure sensor 125μm in diameter has been developed for the measurement in human body, which is fabricated by micromachining and attached to the end of an optical fiber using polyimide adhesive layer.
Proceedings ArticleDOI
Miniature fiber optic pressure sensor for medical applications
TL;DR: In this paper, the authors presented a theoretical description, fabrication and experimental investigation of miniature optical fiber pressure sensor for invasive measurement of blood pressure, which is optimized for human blood pressure range, namely from 0 to 40 kPa (0 to 300 mmHg).