Journal ArticleDOI
Multi‐ion‐beam reactive sputter deposition of ferroelectric Pb(Zr,Ti)O3 thin films
S. B. Krupanidhi,H. Hu,V. Kumar +2 more
Reads0
Chats0
TLDR
In this paper, a multi-ion-beam reactive sputter (MIBERS) deposition technique was devised to grow ferroelectric lead zirconate titanate (PZT) thin films of different compositions (Zr/Ti ratios of 50/50 and 56/44) from individual metal targets of Pb, Zr, and Ti.Abstract:
A multi‐ion‐beam reactive sputter (MIBERS) deposition technique was devised to grow ferroelectric lead zirconate titanate (PZT) thin films of different compositions (Zr/Ti ratios of 50/50 and 56/44) from individual metal targets of Pb, Zr, and Ti. This technique offers a highly controllable deposition process allowing excellent uniformity in composition and thickness over a large area (7.5 cm diameter) on a reproducible basis. The PZT films were deposited on a variety of unheated substrates and annealed by two different techniques, rapid thermal annealing and conventional furnace annealing. Both techniques induced a perovskite phase with good morphology. The effect of the excess Pb content was observed in terms of the crystallization and morphology. It was seen that the presence of excess Pb tends to enhance perovskite phase formation but degrades the morphology. The effect of the substrates was observed in terms of crystallization and orientation. A low‐energy oxygen ion beam was employed to modify the f...read more
Citations
More filters
Journal ArticleDOI
Science and technology of ferroelectric films and heterostructures for non-volatile ferroelectric memories
TL;DR: In this paper, a review of the status of thin film ferroelectric materials for nonvolatile memories is presented, where key materials issues relevant to the integration of these materials on Si wafers are discussed.
Journal ArticleDOI
Current-voltage characteristics of ultrafine-grained ferroelectric Pb(Zr, Ti)O 3 thin films
H. Hu,S. B. Krupanidhi +1 more
TL;DR: In this article, a double-depletion-layer barrier model is used to describe the origin of high resistivity of the grain boundaries, and a unified grain boundary modeling reconciles different types of conduction mechanisms in the ultrafine-grained ferroelectric thin films.
Journal ArticleDOI
Dependence of electrical properties of epitaxial Pb(Zr,Ti)O3 thick films on crystal orientation and Zr∕(Zr+Ti) ratio
Shintaro Yokoyama,Yoshihisa Honda,Hitoshi Morioka,Shoji Okamoto,Hiroshi Funakubo,Takashi Iijima,Hirofumi Matsuda,Keisuke Saito,Takashi Yamamoto,Hirotake Okino,Osami Sakata,Shigeru Kimura +11 more
TL;DR: In this paper, the effects of the Zr∕(Zr+Ti) ratio on the crystal structure, dielectric and ferroelectric properties, and piezoelectric response of these films with different crystal orientations were systematically investigated.
Journal ArticleDOI
Structures and electrical properties of barium strontium titanate thin films grown by multi-ion-beam reactive sputtering technique
C. J. Peng,S. B. Krupanidhi +1 more
TL;DR: In this article, the structure and electrical properties of multi-ion beam reactive sputter (MIBERS) deposited barium strontium titanate (BST) films were characterized in terms of Ba/Sr ratio, substrate temperature, annealing temperature and time, film thickness, doping concentration, and secondary low-energy oxygen ion bombardment.
Journal ArticleDOI
Epitaxial growth of ferroelectric oxide films
TL;DR: In this paper, a brief overview of the most common ferroelectric materials, the perovskites and the Aurivillius families, and deposition methods for epitaxial growth are reviewed.
References
More filters
Book
Thin Film Processes
TL;DR: In this article, the authors discuss the formation of Inorganic Films by Remote Plasma-Enhanced Chemical-Vapor Deposition (PLVD) and its application in solvent-gel coatings.
Journal ArticleDOI
Revised structure zone model for thin film physical structure
TL;DR: In this paper, the structure zone models, previously developed to classify the larger sized physical structures, are revised to account for the evolutionary growth stages of structure development as well as the separate effects of thermal and bombardment induced mobility.
Journal ArticleDOI
Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: Electrical, optical, and electro‐optic properties
Guanghua Yi,Z. Wu,Michael Sayer +2 more
TL;DR: In this article, a crack-free transparent ferroelectric polycrystalline Pb(Zr,Ti)O3 thin films were prepared by spin-coating solutions of complex alkoxides.
Book
Principles of extractive metallurgy
TL;DR: The principles of extractive metallurgy were planned in four volumes as follows: Volume 1: General Principles, Volume 2: Hydrometallurgy, Volume 3: Pyrometalurgy, and Volume 4: Electrometalkurgy as discussed by the authors.