Proceedings ArticleDOI
Non-destructive optical system based on digital holographic microscope for quasi real-time characterization of micromechanical shunt switch
V. Striano,Giuseppe Coppola,Pietro Ferraro,Domenico Alfieri,Sergio De Nicola,Andrea Finizio,Giovanni Pierattini,Romolo Marcelli,Paolo Mezzanotte +8 more
- Vol. 5858, pp 312-320
TLDR
In this article, a digital holographic microscope (DHM) is employed as non-invasive metrological tool for inspection and characterisation of a micromechanical shunt switches in coplanar waveguide configuration (CPW) for microwave applications.Abstract:
A digital holographic microscope (DHM) is employed as non-invasive metrological tool for inspection and
characterization of a micromechanical shunt switches in coplanar waveguide configuration (CPW) for microwave
applications. The switch is based on a bridge that can be actuated by using electrodes positioned laterally with respect to
the central conductor of the CPW. The DHM features, such as speed, contact-less and non-destructivity, have allowed a
full characterization of an electrical actuated shunt switches. In particular, the out-of-plane deformation of the bridge due
to the applied voltage has been investigated with high accuracy. DHM inspection allows to investigate the shape of the
bridge during the actuation, the total warpage due to the actuation, possible residual gap, possible hysteresis, and so on.
These characterizations have been carried out both in static and in dynamic condition. In full paper the complete
characterization will be reported together with an accurate description of the optical system employed for the
investigation.read more
Citations
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Proceedings ArticleDOI
Improvement of the reconstruction algorithm for extended focus image of MEMS by digital holography
V. Striano,Giuseppe Coppola,Pietro Ferraro,Domenico Alfieri,Simonetta Grilli,Sergio De Nicola,Andrea Finizio,Giovanni Pierattini +7 more
TL;DR: In this article, the Extended Focus Images (EFI) technique has been applied to obtain a best focused reconstructed image and profile of some micro-electro-mechanical systems.
References
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Ulf Schnars,Werner Jüptner +1 more
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TL;DR: In this paper, the authors concentrate on electrostatic switches at 0.1-100 GHz with high reliability (100 million to 10 billion cycles) and wafer-scale manufacturing techniques.
MonographDOI
RF MEMS and their applications
TL;DR: In this article, the authors present an integration and packaging for RF MEMS devices, including inductors and capacitors, phase shifters, and relay switches. But they do not discuss how to construct them.