Journal ArticleDOI
Nonlinear analysis and effectiveness of weakly coupled microbeams for mass sensing applications
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TLDR
In this paper, the authors developed a general model of a mass sensor made of N weakly mechanically coupled microbeams subject to electric actuation and verified the developed model by comparing the simulated pull-in voltages, natural frequencies, and frequency response of a two-weakly coupled beam system against their experimental counterparts reported in the literature.Abstract:
In this work, we develop a general model of a mass sensor made of N weakly mechanically coupled microbeams subject to electric actuation. The developed model is verified by comparing the simulated pull-in voltages, natural frequencies, and frequency response of a two-weakly coupled beam system against their experimental counterparts reported in the literature. The sensitivity of the mass sensor in terms of frequency shift is observed to significantly increase when enlarging the size of the beams array. The simulation results reveal a clear transformation of the frequency response from a nearly linear to nonlinear behavior as result of the deposition of a small mass on the coupled system. As such, we show the potential use of bifurcations that result in an abrupt jump to a large-amplitude motion for sensing purposes. Furthermore, by exploiting the mode localization effect, the nonlinear response can be triggered on one of the beams when an added masses is introduced, allowing for an amplitude-based mass detection mechanism of the device. The proposed sensing method has the possibility to operate in bifurcation mode for mass threshold detection that can be tuned using the AC actuation or in continuous mode based on extracting the added mass from the amplitude of the sensing beam’s oscillations.read more
Citations
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Bifurcation-based micro/nano-electromechanical mass detection
TL;DR: In this paper, an alternative mass detection based on the hysteretic behavior of the nonlinear frequency responses that takes advantage of bi-stability and bifurcations is investigated.
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Deep learning for gas sensing using MOFs coated weakly-coupled microbeams
TL;DR: In this paper , the authors proposed a novel MEMS gas sensor made of two mechanically-coupled microbeams coated with metal organic frameworks and subject to electric actuation, which exploited the dynamic features of the microstructure to simultaneously detect the presence of two gases, namely CO2 and CH4, and estimate their concentrations.
Journal ArticleDOI
On the equivalence between mass perturbation and DC voltage bias in coupled MEMS resonators: Theoretical and experimental investigation
TL;DR: In this article , the authors investigated the effect of voltage bias on the frequency response of mechanically coupled microbeams under electric actuation and developed and validated a mathematical model to simulate the response of the device.
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Exploiting bifurcation behaviors in parametrically excited mode-localized resonators for mass sensing
TL;DR: In this paper, the nonlinear bifurcation behaviors in parametrically excited mode-localized resonators are theoretically analyzed and introduced to improve the robustness of mass sensors.
References
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Journal ArticleDOI
Ultrasensitive mass sensing using mode localization in coupled microcantilevers
TL;DR: In this article, Anderson or vibration localization in coupled microcantilevers was used to detect the added mass of a target analyte, and the resonance frequencies and eigenstates of two nearly identical coupled gold-foil microcants were analyzed.
Journal ArticleDOI
Biosensing using dynamic-mode cantilever sensors: a review.
Blake N. Johnson,Raj Mutharasan +1 more
TL;DR: Current progress on the use of dynamic-mode cantilever sensors for biosensing applications is critically reviewed, including fluid-structure interaction and its dependence on the Reynolds number for Newtonian fluids.
Journal ArticleDOI
Highly sensitive mass detection and identification using vibration localization in coupled microcantilever arrays
TL;DR: In this paper, the use of vibration localization in large arrays of mechanically coupled, nearly identical microcantilevers for ultrasound mass detection and identification was studied, and it was shown that eigenmode changes in such an array can be two to three orders of magnitude greater than relative changes in resonance frequencies when an analyte mass is added.
Journal ArticleDOI
A review on coupled MEMS resonators for sensing applications utilizing mode localization
Chun Zhao,Chun Zhao,Mohammad H. Montaseri,Graham S. Wood,Suan Hui Pu,Ashwin A. Seshia,Michael Kraft +6 more
TL;DR: In this article, the authors review a recent technology development based on coupled MEMS resonators that has the potential of fundamentally transforming MEMS Resonant sensors, including the mode localization effect.
Journal ArticleDOI
Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications
TL;DR: In this article, a nonlinear multiphysics model based on the Euler-Bernoulli equation is presented for the case of electrostatically actuated nanocantilevers.