Novel single phase vanadium dioxide nanostructured films for methane sensing near room temperature
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In this paper, vanadium dioxide (VO2) nanostructured films are synthesized by pulsed dc-magnetron sputtering of V target followed by oxidation in O2 atmosphere at 550°C.Abstract:
Methane (CH4) gas sensing properties of novel vanadium dioxide (VO2) nanostructured films is reported for the first time. The single phase nanostructures are synthesized by pulsed dc-magnetron sputtering of V target followed by oxidation in O2 atmosphere at 550 °C. The partial pressure of O2 is controlled to obtain stoichiometric VO2 with the samples showing rutile monoclinic crystalline symmetry and regions of rod shaped nano-architectures. These nanostructured films exhibit a reversible semiconductor to metal transition in the temperature range of 60–70 °C. Gas sensing experiments are carried out in the temperature span from 25 °C to 200 °C in presence of CH4. These experiments reveal that the films respond very well at temperatures as low as 50 °C, in the semiconducting state.read more
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