Open Access
Parallel-Plate Electrostatic Dual Mass Oscillator
TLDR
In this article, a surface-micromachined two-degree-of-freedom system that was driven by parallel-plate actuation at antiresonance was demonstrated, which consisted of an absorbing mass connected by folded springs to a drive mass.Abstract:
A surface-micromachined two-degree-of-freedom system that was driven by parallel-plate actuation at antiresonance was demonstrated. The system consisted of an absorbing mass connected by folded springs to a drive mass. The system demonstrated substantial motion amplification at antiresonance. The absorber mass amplitudes were 0.8-0.85 pm at atmospheric pressure while the drive mass amplitudes were below 0.1 pm. Larger absorber mass amplitudes were not possible because of spring softening in the drive mass springs. Simple theory of the dual-mass oscillator has indicated that the absorber mass may be insensitive to limited variations in strain and damping. This needs experimental verification. Resonant and antiresonant frequencies were measured and compared to the designed values. Resonant frequency measurements were difficult to compare to the design calculations because of time-varying spring softening terms that were caused by the drive configuration. Antiresonant frequency measurements were close to the design value of 5.1 kHz. The antiresonant frequency was not dependent on spring softening. The measured absorber mass displacement at antiresonance was compared to computer simulated results. The measured value was significantly greater, possibly due to neglecting fringe fields in the force expression used in the simulation.read more
Citations
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Journal ArticleDOI
Nonresonant micromachined gyroscopes with structural mode-decoupling
Cenk Acar,Andrei M. Shkel +1 more
TL;DR: In this article, the authors proposed a novel four-degrees-of-freedom (DOF) nonresonant micromachined gyroscope design concept based on utilizing dynamical amplification both in the 2DOF drive-direction oscillator and the 2-DOF sense direction oscillator to achieve large oscillation amplitudes without resonance.
Journal ArticleDOI
Structural design and experimental characterization of torsional micromachined gyroscopes with non-resonant drive mode
Cenk Acar,Andrei M. Shkel +1 more
TL;DR: In this paper, a gimbal-type torsional micromachined gyroscope with a non-resonant actuation scheme is presented. But the design concept is based on employing a 2 degrees-of-freedom (2-DOF) drive-mode oscillator comprising a sensing plate suspended inside two gimbals.
Journal ArticleDOI
Inherently robust micromachined gyroscopes with 2-DOF sense-mode oscillator
Cenk Acar,Andrei M. Shkel +1 more
TL;DR: In this article, a 2-DOF sense-mode oscillator with two resonant peaks and a flat region between the peaks was proposed to provide inherent robustness against structural parameter variations.
Patent
Microelectromechanical dual-mass resonator structure
TL;DR: In this article, a dual-mass microelectromechanical (MEM) resonator structure is disclosed in which a first mass is suspended above a substrate and driven along a linear or curved path by a parallel-plate electrostatic actuator.
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