Journal ArticleDOI
Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics
E. W. Backer,W. Ehrfeld,D. Münchmeyer,H. Betz,A. Heuberger,S. Pongratz,W. Glashauser,H. J. Michel,R. v. Siemens +8 more
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TLDR
In this paper, X-ray lithography using synchrotron radiation has been applied in a multi-step process for the production of plastic moulds to be used in the fabrication of separation nozzles by electrodeposition.Abstract:
X-ray lithography using synchrotron radiation has been applied in a multi-step process for the production of plastic moulds to be used in the fabrication of separation nozzles by electrodeposition. For characteristic dimensions of a few microns a total height of the nozzle structure of about 400 μm has been achieved. Structural details of about 0.1 μm are being reproduced across the total thickness of the polymer layer. The surface finish of metallic separation nozzles produced by electrodeposition was equivalent to the high quality of the polymer surface. The separation-nozzle systems fabricated by the described method allow an increase by a factor three of the gas pressure in separationnozzle plants as compared to the present standard. This results in considerable savings in the enrichment of 235U for nuclear power production.read more
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Review on micro molding of thermoplastic polymers
M Heckele,Werner Karl Schomburg +1 more
TL;DR: A more than 30-year-old history and the present state of development and applications of micro-molds from thermoplastic polymers can be found in this article, where the advantages and drawbacks of various types of tool fabrication are discussed.
Journal ArticleDOI
A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs
M.S. Islam,Patrick J. McNally +1 more
TL;DR: In this article, the status of work performed by the Karlsruhe Nuclear Research Center with the cooperation of Siemens AG and the Fraunhofer Institute for Solid State Technology is described.
Journal ArticleDOI
Evolution of Microchannel Flow Passages-Thermohydraulic Performance and Fabrication Technology
TL;DR: In this article, the authors provide a roadmap of development in the thermal and fabrication aspects of microchannels as applied in microelectronics and other high heat-flux cooling applications.
Patent
Arrays of protein-capture agents and methods of use thereof
TL;DR: Arrays of protein-capture agents useful for the simultaneous detection of a plurality of proteins which are the expression products, or fragments thereof, of a cell or population of cells in an organism are provided in this paper.
Journal ArticleDOI
Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review
Chantal Khan Malek,Volker Saile +1 more
TL;DR: LIGA, an alternative microfabrication process combining deep X-ray lithography, plating-through-mask and molding, enables the highly precise manufacture of high-aspect-ratio microstructures with large structural height ranging from hundreds to thousands of micrometers thick.
References
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Journal ArticleDOI
High resolution, steep profile resist patterns
J. M. Moran,D. Maydan +1 more
TL;DR: In this paper, a 2.6 μm-thick organic layer was used to generate steep profile patterns for photo and electron lithography, which reduced the need for thick resist patterns for the lithography step and ensured high resolution combined with good step coverage.
Journal ArticleDOI
Uranium enrichment by the separation-nozzle process
TL;DR: It can be stated that the erection of a separation-nozzle demonstration plant in Brazil can be recognized as the implementation of an enrichment process which combines a reliable and comparatively simple technology with a high potential for further improvements.
Journal Article
Uranium enrichment by separation nozzle process
Development and technical implementation of the separation nozzle process for enrichment of uranium-235
TL;DR: In the separation nozzle process, enrichment is achieved by extremely high centrifugal forces in a curved flow of UF/sub 6/ diluted by a light gas as discussed by the authors, and the first commercial application is in Brazil, where a so-called First Cascade consisting of 24 separation nozzle stages is under construction.