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Fundamentals of microfabrication
TLDR
The second edition of the Fundamentals of Microfabrication as discussed by the authors provides an in-depth coverage of the science of miniaturization, its methods, and materials, from the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering.Abstract:
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.New in the Second EditionRevised chapters that reflect the many recent advances in the fieldUpdated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.Many more links to the WebProblem sets in each chapterread more
Citations
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Journal ArticleDOI
Poly(dimethylsiloxane) as a material for fabricating microfluidic devices.
TL;DR: This Account summarizes techniques for fabrication and applications in biomedicine of microfluidic devices fabricated in poly(dimethylsiloxane) (PDMS).
Journal ArticleDOI
Micro Total Analysis Systems. 1. Introduction, Theory, and Technology
TL;DR: In this article, the authors present a review of the book.http://www.reviewreviews.com/reviews/book-reviews-of-the-book
Journal ArticleDOI
Physics and applications of microfluidics in biology.
TL;DR: The focus of this review is microscale phenomena and the use of the physics of the scale to create devices and systems that provide functionality useful to the life sciences.
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Transport phenomena in nanofluidics
TL;DR: In this paper, the authors investigated the transport properties of 50-nm-high 1D nanochannels on a chip and showed that they can be used for the separation and preconcentration of proteins.
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Creating, transporting, cutting, and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuits
TL;DR: In this paper, the authors report the completion of four fundamental fluidic operations considered essential to build digital microfluidic circuits, which can be used for lab-on-a-chip or micro total analysis system (/spl mu/TAS): 1) creating, 2) transporting, 3) cutting, and 4) merging liquid droplets, all by electrowetting.