Proceedings ArticleDOI
Silicon MEMS for two different light sources
Minoru Sasaki
- pp 1-2
TLDR
In this article, the surface plasmon polariton is combined with the basic thermal emission from the microheater for the wavelength selectivity, and the wavelength is decided by the gas species mixed together in He discharging gas.Abstract:
The semiconductor silicon is known as the material which is not suitable for the light source. Outside the visible light region, we try two different light sources. One is the infrared light source. The surface plasmon polariton is combined with the basic thermal emission from the microheater for the wavelength selectivity. Another is vacuum UV light source using the atmospheric pressure plasma. The wavelength is decided by the gas species mixed together in He discharging gas. In both devices, MEMS structures play the important roles for the efficiency.read more
References
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Journal ArticleDOI
An atmospheric pressure inductively coupled microplasma source of vacuum ultraviolet light
TL;DR: In this paper, an inductively coupled microplasma source operating under atmospheric pressure was fabricated as a vacuum ultraviolet (VUV) light source, which consisted of a quartz capillary tube surrounded by a coil antenna.
Journal ArticleDOI
Multiwavelength Selective IR Emission Using Surface Plasmon Polaritons for Gas Sensing
TL;DR: In this paper, a multiwavelength selective infrared (IR) emission utilizing reflection type gratings is proposed, where surface plasmon polariton (SPP) is excited on the metallic grating by IR having the wavelength nearly equal to the grating pitch.
Proceedings ArticleDOI
Power efficient microheater for wavelength selective infrared emitter and CO 2 gas sensing
TL;DR: In this article, a new microheater for the wavelength selective infrared emitter, which is fabricated showing the clear enhanced emission peak due to the surface plasmon polariton.