Proceedings ArticleDOI
Silicon micromachined K-band filters
Sumit Kumar Khandelwal,Deepak Bansal,Kamaljit Rangra +2 more
- pp 354-357
TLDR
In this paper, a substrate integrated waveguide (SIW) based filter at K band frequency on silicon substrate is described, where TMAH etching is used to form the via-holes for SIW cavities.Abstract:
This paper describes a substrate integrated waveguide (SIW) based filter at K band frequency on silicon substrate. TMAH etching is used to form the via-holes for SIW cavities. Simulations and comparison of TMAH and Deep reactive ion etching (DRIE) etched cavity has been presented. A micro- machined filter is made from rectangular cavities integrated into a silicon substrate and is fed by coplanar waveguide (CPW) transmission-lines through current probes. Simulated filter using TMAH etching shows insertion loss of 0.29dB and return loss of 21.96 dB.read more
Citations
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Journal ArticleDOI
E-band cavity diplexer based on micromachined technology
Valeria Nocella,Luca Pelliccia,Paola Farinelli,Roberto Sorrentino,Mario Costa,Dai Yufeng,Zhou Yanzhao +6 more
TL;DR: In this article, a robust and tuneless micromachined waveguide diplexer operating in the frequency range 71-86 GHz is presented, which consists of two filters combined to a common waveguide port via an E-plane T-junction.
Proceedings ArticleDOI
Micromachined filters in multilayer technology for on-board communication systems in Ka-band
TL;DR: In this article, a new concept for compact and low-loss Ka-band micromachined bandpass filters for next generation on-board communications is presented which combines micromACHined cavities with multilayer technology on silicon.
References
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Proceedings ArticleDOI
Monolithic silicon micromachined Ka-band filters
Yu Yuan-wei,Zhang Yong,Zhu Jian +2 more
TL;DR: In this article, a 5-pole micromachined filter is made from rectangular cavities integrated into a silicon substrate and is fed by coplanar waveguide(CPW) transmission-lines through current probes.
Proceedings ArticleDOI
A novel compact quasi planar silicon filter at 45 GHz based on metallic periodic structure
P. Ferrand,Matthieu Chatras,Dominique Baillargeat,Pierre Blondy,Serge Verdeyme,Jérôme Puech,L. Lapierre +6 more
TL;DR: In this paper, a planar filter at 45 GHz with 8% bandwidth at?3dB and 2.6 dB insertion losses is presented, based on a metallized holes periodic lattice that forms coupled silicon resonators.