Journal ArticleDOI
Structure and photoluminescence properties of SiCN films grown by dual ion beam reactive sputtering deposition
Reads0
Chats0
TLDR
In this article, dual ion beam reactive sputtering with various assisting ion beam energies at room temperature was used to investigate the properties of silicon carbide nitride (SiCN) films and showed that an increase in assisting ionbeam energy remarkably influences film composition.About:
This article is published in Vacuum.The article was published on 2014-03-01. It has received 16 citations till now. The article focuses on the topics: Ion beam & Sputter deposition.read more
Citations
More filters
Journal ArticleDOI
PECVD synthesis, optical and mechanical properties of silicon carbon nitride films
Evgeniya Ermakova,Yurii M. Rumyantsev,Artur Shugurov,Alexey Panin,Alexey Panin,Marina Kosinova +5 more
TL;DR: In this article, the effect of NH3 dilution on the structure and chemical bonding of SiCxNy thin films was investigated by Fourier transform infrared spectroscopy, X-ray photoelectron spectrography, Raman spectrographic, high-resolution transmission electron microscopy, and energy-dispersive Xray analysis, and the influence of deposition conditions on the transmittance, the optical band gap, the hardness and the Young's modulus of SiNy films was studied.
Journal ArticleDOI
Nanostructure and optical property tuning between the graphitic-like CNx and fullerene-like β-C3N4 via Fe doping and substrate temperature
Zhengwei Xiong,Linhong Cao +1 more
TL;DR: In this paper, the structural and optical properties of the Fe-doped carbon nitride thin films were investigated by the plasma enhanced chemical vapor deposition method, and the authors obtained a self-standing film, consisting of the nano-crystallized β-C3N4 and amorphous carbon Nitride.
Journal ArticleDOI
The influence of carbon on the structure and photoluminescence of amorphous silicon carbonitride thin films
TL;DR: In this article, thin films of silicon carbonitride (SiCN) were deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition using silane, nitrogen, and methane as the gas precursors.
Journal ArticleDOI
Investigation of silicon carbon nitride nanocomposite films as a wear resistant layer in vitro and in vivo for joint replacement applications.
TL;DR: A mouse implantation study demonstrated the excellent in vivo biocompatibility and functional reliability of wear resist layer for joint replacements with a Si doped a-CNx coating for 36days.
Journal ArticleDOI
Multi-phase structured hydrogenated amorphous silicon carbon nitride thin films grown by plasma enhanced chemical vapour deposition
Mohd Azam Abdul Rahman,Mohd Azam Abdul Rahman,Wee Siong Chiu,Choon Yian Haw,Choon Yian Haw,Ragib Badaruddin,Fatemeh Shariatmadar Tehrani,Mohamad Rusop,Poi Sim Khiew,Saadah Abdul Rahman +9 more
TL;DR: In this paper, hydrogenated amorphous silicon carbon nitride (a-SiCN:H) films were grown by plasmaenhanced chemical vapour deposition (PECVD) process using SiH4, CH4 and N2 gas discharge.
References
More filters
Journal ArticleDOI
Raman Spectrum of Graphite
F. Tuinstra,J. L. Koenig +1 more
TL;DR: Raman spectra are reported from single crystals of graphite and other graphite materials as mentioned in this paper, and the Raman intensity of this band is inversely proportional to the crystallite size and is caused by a breakdown of the k-selection rule.
Journal ArticleDOI
Origin of dispersive effects of the Raman D band in carbon materials
TL;DR: In this article, the origin and dispersion of the anomalous disorder-induced Raman band (D$ band) observed in all hybridized disordered carbon materials near the K point of the Brillouin zone was investigated as a function of incident laser energy.
Journal ArticleDOI
Symmetry breaking in nitrogen-doped amorphous carbon: Infrared observation of the Raman-active G and D bands.
TL;DR: In this article, the preparation of hard nitrogenated amorphous carbon films doped with as much as 20 at. % nitrogen was reported, and the nitrogen groups created by doping do not dramatically affect the film structure, but are found to break symmetry in the Raman-active G (graphitic) and D (disordered) bands to become ir active.
Journal ArticleDOI
Visible photoluminescence from nanocrystallite Ge embedded in a glassy SiO 2 matrix: Evidence in support of the quantum-confinement mechanism
TL;DR: Broadband photoluminescence spectra are observed in the visible wavelength range at room temperature, and they exhibit pronounced blueshifts of the peak energies and broadening of the PL spectra, which can be correlated to the change in the size.
Journal ArticleDOI
Effect of residual stress on the Raman-spectrum analysis of tetrahedral amorphous carbon films
TL;DR: In this paper, the effect of residual stress on the G-peak position of the Raman spectrum has been investigated in both tetrahedral amorphous carbon (a-C:H) and hydrogenated a-c:H films.
Related Papers (5)
Study of structural and electronic environments of hydrogenated amorphous silicon carbonitride (a-SiCN:H) films deposited by hot wire chemical vapor deposition
Bibhu P. Swain,Nong M. Hwang +1 more