Journal ArticleDOI
Surface micromachined Fabry-Perot tunable filter
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TLDR
In this article, the authors reported the fabrication of a wavelength tunable optical filter using surface micromachining technology, which can be readily integrated with surface emitting lasers, modulators, and detectors.Abstract:
We report the fabrication of a wavelength tunable optical filter using surface micromachining technology. The center wavelength is 1.517 /spl mu/m and the transmission bandwidth is 5 nm. The device with a 50-/spl mu/m diameter aperture has an optical loss of about 5 dB. A continuous wavelength tuning of 60 nm has been demonstrated. This device may find applications in optical sensing and wavelength division multiplexing systems, and can be readily integrated with surface emitting lasers, modulators, and detectors.read more
Citations
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Journal ArticleDOI
Optical MEMS for Lightwave Communication
TL;DR: In this article, the authors review the current state of the art of MEMS devices and subsystems for lightwave communication applications, which can either be broadband (wavelength independent) or wavelength selective.
Journal ArticleDOI
State-of-the-art in integrated optical microspectrometers
TL;DR: An overview of microspectrometers operating in the visible and infrared spectral range is provided and it is demonstrated that the resolution is primarily limited due to the short optical path that is inherent to a microsystem, optical properties of silicon IC-process compatible materials, and lack of adequate optical signal conditioning.
Journal ArticleDOI
MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range
TL;DR: In this article, the authors discuss grating-based and interferometer-based mini- and micro-spectrometers, shows performances already reported, the trends, the potential, the limitations and approaches to obtain a sufficient optical performance, in terms of spectral resolution and throughput, for serving the majority of applications.
Patent
Micromechanical optical switch
Mohammed N. Islam,Amos Kuditcher +1 more
TL;DR: In this paper, an optical switch element is described, which includes a fixed layer disposed outwardly from a substrate and a movable mirror assembly disposed inwardly from the fixed layer.
Patent
Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter
TL;DR: In this paper, a method for fabricating microelectromechanically tunable vertical-cavity surface-emitting lasers and micro-compositionally tunable Fabry-Perot filters with precise lateral and vertical dimensional control is provided.
References
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Proceedings ArticleDOI
Deformable-Mirror Spatial Light Modulators
TL;DR: The first comprehensive review of the Texas Instruments deformable-mirror device (DMD) is presented in this paper, where the DMD architecture, fabrication, and operation (both analog and digital) are described.
Journal ArticleDOI
GaAs micromachined widely tunable Fabry-Perot filters
TL;DR: In this paper, a surface normal micromachined GaAs Fabry-Perot filter with 70 nm of continuous tuning, 19 dB extinction ratio, 4.9 V of tuning voltage, and 50 pA tuning current is presented.
Journal ArticleDOI
Micro-machined three-dimensional micro-optics for integrated free-space optical system
TL;DR: In this paper, rotatable mirrors, lenses and beam-splitters are held at 90/spl deg/ angle to the substrate by side latches, and the optical system is pre-aligned by photolithography, which offers a new approach to free space integrated optics and low-cost optical packaging.
Journal ArticleDOI
Optoelectronic packaging using silicon surface-micromachined alignment mirrors
TL;DR: In this article, a batch-assembled optoelectronic packaging technology based on silicon surface-micromachined alignment mirrors is described, which has the functionality, stability and accuracy required for active semiconductor laser-to-filter (single mode) coupling.
Journal ArticleDOI
Micromotor grating optical switch.
TL;DR: Polysilicon micromotors with diffraction gratings fabricated on the polished surface of the polysilicon rotor for optical switching applications allowing for multiple optical outputs from a single input beam is described.