The characteristic shape of emission profiles of plasma spokes in HiPIMS: the role of secondary electrons
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In this paper, a time resolved analysis of the emission of HiPIMS plasmas reveals inhomogeneities in the form of rotating spokes, which can be explained by localized generation of secondary electrons, resulting in an energetic electron pressure exceeding the magnetic pressure.Abstract:
A time resolved analysis of the emission of HiPIMS plasmas reveals inhomogeneities in the form of rotating spokes. The shape of these spokes is very characteristic depending on the target material. The localized enhanced light emission has been correlated with the ion production. Based on these data, the peculiar shape of the emission profiles can be explained by the localized generation of secondary electrons, resulting in an energetic electron pressure exceeding the magnetic pressure. This general picture is able to explain the observed emission profile for different target materials including gas rarefaction and second ionization potential of the sputtered elements.read more
Citations
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Journal ArticleDOI
Physics and technology of magnetron sputtering discharges
Journal ArticleDOI
Plasma diagnostics for understanding the plasma?surface interaction in HiPIMS discharges: a review
TL;DR: The physical and chemical aspects of plasma surface interaction in high-power impulse magnetron sputtering (HiPIMS) discharges are overviewed in this article, where the data obtained by various plasma diagnostic methods representing the important sputtering discharge regions, namely the cathode vicinity, plasma bulk, and substrate vicinity, are reported.
Journal ArticleDOI
Plasma potential of a moving ionization zone in DC magnetron sputtering
Matjaž Panjan,André Anders +1 more
TL;DR: In this paper, movable emissive and floating probes were used to determine the plasma and floating potentials of an ionization zone (spoke) in a direct current magnetron sputtering discharge.
Journal ArticleDOI
On the road to self-sputtering in high power impulse magnetron sputtering : particle balance and discharge characteristics
Chunqing Huo,Daniel Lundin,Daniel Lundin,Michael A. Raadu,André Anders,Jon Tomas Gudmundsson,Jon Tomas Gudmundsson,Nils Brenning +7 more
TL;DR: In this paper, the onset and development of self-sputtering in a high power impulse magnetron sputtering (HiPIMS) discharge have been studied using a plasma chemical model and a set of experimental data.
Journal ArticleDOI
Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering
TL;DR: In this article, the authors apply the Penning-Thornton paradigm to the electric potential structure of ionization zones and show that electron heating in the electric field of the magnetic presheath is dominant over heating by secondary electrons.
References
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Book
CRC Handbook of Chemistry and Physics
TL;DR: CRC handbook of chemistry and physics, CRC Handbook of Chemistry and Physics, CRC handbook as discussed by the authors, CRC Handbook for Chemistry and Physiology, CRC Handbook for Physics,
Book
Principles of Plasma Discharges and Materials Processing
TL;DR: In this paper, the authors introduce the concept of particle and energy balance in discharges and introduce the theory of collision dynamics and wave-heated discharges, as well as chemical reactions and equilibrium.
Journal ArticleDOI
Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering
TL;DR: In this paper, a gated camera working in concert with a streak camera for Al, Nb, Cu, and W targets in Ar or Kr background gas was used to investigate the ionization zones.
Journal ArticleDOI
High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
Arutiun P. Ehiasarian,Ante Hecimovic,T. de los Arcos,Roger New,V Schulz-von der Gathen,Marc Böke,Jörn Winter +6 more
TL;DR: In this article, the authors report on instabilities in high power impulse magnetron sputtering plasmas which are likely to be of the generalized drift wave type, characterized by well defined regions of high and low plasma emissivity along the racetrack of the magnetron and cause periodic shifts in floating potential.