Journal ArticleDOI
The depth resolution of sputter profiling
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In this article, it is shown that the bulk radiation damage accompanying sputtering events sets ultimate limits to the depth resolution attainable in sputter profiling, and guidelines for selection of projectile species and energies to minimize such mixing are given and numerical estimates for attainable depth resolutions.Abstract:
It is shown that the bulk radiation damage accompanying sputtering events sets ultimate limits to the depth resolution attainable in sputter profiling. These limits have been reached in a few cases but most published experimental resolutions are dominated either by instrumental effects or deterioration of depth resolution caused by surface-topography changes. The radiation-damage induced mixing is called “cascade mixing”. Guidelines for selection of projectile species and energies to minimize such mixing are given and numerical estimates for attainable depth resolutions are presented. Finally, the influence of cascade mixing is assessed relative to that of recoil implantation.read more
Citations
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Journal ArticleDOI
Theoretical aspects of atomic mixing by ion beams
Peter Sigmund,A. Gras-Marti +1 more
TL;DR: In this paper, the half-widths of matrix relocation profiles were determined explicitly for ion-impurity knockon events (recoil implantation) as well as isotropic cascade mixing.
Journal ArticleDOI
When is thermodynamics relevant to ion-induced atomic rearrangements in metals?
TL;DR: In this article, the problem of ion-induced mixing of metal bilayers is examined in the limit of heavy metals (Z ≳ 20) and heavy energetic ions (E ≳ 100 keV) and in the absence of delayed effects such as radiation enhanced thermal diffusion.
Journal ArticleDOI
The quantitative analysis of surfaces by XPS: A review
TL;DR: In this article, a general framework is presented for the quantitative analysis of surfaces by X-ray photoelectron spectroscopy (XPS) or ESCA, which starts by considering analysis using reference data recorded on the same instrument and under identical conditions as the analysed sample.
Journal ArticleDOI
Primary radiation damage: A review of current understanding and models
Kai Nordlund,Steven J. Zinkle,Steven J. Zinkle,A. E. Sand,F. Granberg,Robert S Averback,R. E. Stoller,Tomoaki Suzudo,Lorenzo Malerba,Florian Banhart,William J. Weber,William J. Weber,Francois Willaime,Sergei L. Dudarev,David Simeone +14 more
TL;DR: In this article, the authors consider the extensive experimental and computer simulation studies that have been performed over the past several decades on what the nature of the primary damage is, and provide alternatives to the current international standard for quantifying this energetic particle damage, the Norgett-Robinson-Torrens displacements per atom (NRT-dpa) model for metals.
References
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Journal ArticleDOI
Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
TL;DR: In this article, an integrodifferential equation for the sputtering yield is developed from the general Boltzmann transport equation, and solutions of the integral equation are given that are asymptotically exact in the limit of high ion energy as compared to atomic binding energies.
Book ChapterDOI
Physical Properties and Interrelationships of Metallic and Semimetallic Elements
TL;DR: In this paper, the authors present a compilation of physical properties used in alloying theory, including magnetic susceptibility, electrical resistivity, and thermal conductivity, as well as some interrelationships of the physical properties.
Journal ArticleDOI
Production and recovery of electron-induced radiation damage in a number of metals
P. G. Lucasson,Robert M. Walker +1 more
TL;DR: In this article, the changes in residual electrical resistance produced by bombardment with high-energy electrons were measured for a number of metals as a function of electron energy in the range from 0.5 to 1.4 MeV.